IP Library Granted Patent US 9,165,862
Granted Patent B1
US 9,165,862 · App. 14/477,885 · Granted Oct 20, 2015

Semiconductor device with plated through holes

Inventors: Boon Yew Low (Petaling Jaya, MY); Ngak Thong Teo (Kuala Lumpur, MY)
Assignee: FREESCALE SEMICONDUCTOR, INC.
H01L23/481H01L21/2885H01L21/561H01L21/566H01L21/76802H01L21/76879H01L23/3107H01L23/49838H01L23/49866H01L23/53228
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Quick Facts
Patent No.
US 9,165,862
App. No.
14/477,885
Granted
Oct 20, 2015
Kind
B1
Abstract

A semiconductor device package such a as Ball Grid Array (BGA), includes a die attached to a substrate. The substrate has a series of plated through holes (PTH) that include a copper pad at each of their ends. The PTH are located in a mold gate region at a corner of the substrate beyond the periphery of the die. Each PTH contains a rivet. The PTH with the pads and rivets stabilize the substrate at the mold gate region, which reduces the possibility of substrate delamination upon degating following an encapsulation process.

Claims (30)

1. A semiconductor device package comprising:

a substrate; and

a die mounted on the substrate, wherein the substrate includes a peripheral region extending beyond a periphery of the die and defining a mold gate region and wherein the mold gate region includes at least one plated through hole; and

a pad formed at each end of the plated through hole.

2. The semiconductor device package of claim 1 , wherein a plurality of plated through holes is located in the mold gate region.

3. The semiconductor package of claim 1 , wherein the plated through hole is electroplated with copper and wherein said pads are copper.

4. The semiconductor device package of claim 1 , wherein the through hole contains a rivet.

5. The semiconductor device package of claim 1 , wherein the die is encapsulated in a molding compound.

6. The semiconductor device package of claim 1 , wherein the substrate is a copper clad laminate.

7. The semiconductor device package of claim 1 , wherein at least a portion of a surface of the mold gate region is plated with a conductive metal.

8. A semiconductor device package, comprising:

a substrate;

a die mounted on the substrate, wherein the substrate includes a peripheral region extending beyond a periphery of the die and defining a mold gate region and wherein the mold gate region includes at least one through hole; and

a rivet formed at least at one end of the through hole.

9. The semiconductor device package of claim 8 , wherein a plurality of through holes is located in the mold gate region of the die, each of the through holes containing rivets.

10. The semiconductor device package of claim 8 , wherein the die is encapsulated in a molding compound.

11. The semiconductor device package of claim 8 , wherein the substrate is a copper clad laminate.

12. The semiconductor device package of claim 8 , wherein at least a portion of a surface of the mold gate region is plated with a conductive metal.

13. A method for manufacturing a semiconductor device package, the method comprising:

mounting a die on a substrate so that a peripheral region of the substrate extends beyond the die to form a mold gate region; and

drilling at least one through hole in the mold gate region to produce a drilled, substrate-die arrangement.

14. The method of claim 13 , comprising:

electroplating the at least one drilled through hole and forming conducting pads at each end thereof on upper and lower surfaces of the mold gate region.

15. The method of claim 13 , comprising inserting a rivet into the at least one drilled through hole.

16. The method of claim 13 , further comprising:

placing a plurality of drilled substrate-die arrangements in a mold;

filling the mold with encapsulating material;

curing the encapsulating material;

removing the mold to leave an array of encapsulated devices connected together by a molding cull; and

removing the molding cull using a degating process.

Assignments (15)
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040925 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Feb 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V. F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 052917/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040928 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Jan 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 052915/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 050744/0097 →
CORRECTIVE ASSIGNMENT TO CORRECT THE NATURE OF CONVEYANCE PREVIOUSLY RECORDED AT REEL: 040632 FRAME: 0001. ASSIGNOR(S) HEREBY CONFIRMS THE MERGER AND CHANGE OF NAME. Recorded Sep 21, 2017
From: FREESCALE SEMICONDUCTOR INC.
To: NXP USA, INC.
Reel/Frame 044209/0047 →
CHANGE OF NAME Recorded Nov 8, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: NXP USA, INC.
Reel/Frame 040632/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 7, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 040928/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 21, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V., F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 040925/0001 →
SUPPLEMENT TO THE SECURITY AGREEMENT Recorded Jun 16, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039138/0001 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 7, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037458/0460 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 7, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037458/0502 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0921 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded Nov 4, 2014
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 034160/0351 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded Nov 4, 2014
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 034160/0370 →
SUPPLEMENT TO IP SECURITY AGREEMENT Recorded Nov 4, 2014
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 034153/0027 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 5, 2014
From: LOW, BOON YEW; TEO, NGAK THONG
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 033673/0343 →