IP Library Granted Patent US 9,472,280
Granted Patent B2
US 9,472,280 · App. 14/732,766 · Granted Oct 18, 2016

Vertical cross point reram forming method

Inventors: Chang Siau (Saratoga, CA); Tianhong Yan (San Jose, CA)
Assignee: SANDISK TECHNOLOGIES LLC
G11C13/0069G11C13/0097G11C2213/71G11C2213/77
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Quick Facts
Patent No.
US 9,472,280
App. No.
14/732,766
Granted
Oct 18, 2016
Kind
B2
Abstract

Methods for forming non-volatile storage elements in a non-volatile storage system are described. In some embodiments, a plurality of forming operations may be performed in which non-volatile storage elements located near the far end of a plurality of word line fingers associated with a word line comb are formed prior to forming other non-volatile storage elements. In one example, non-volatile storage elements may be formed in each of the plurality of word line fingers in parallel and in an order that forms non-volatile storage elements in each of the plurality of word line fingers that are located near the far ends of the plurality of word line fingers before forming other non-volatile storage elements. Each non-volatile storage element that is formed during a forming operation may be current limited while a forming voltage is applied across the non-volatile storage element.

Claims (49)

1. A method for operating a non-volatile storage system, comprising:

performing a first memory array operation on a first plurality of non-volatile storage elements, the first plurality of non-volatile storage elements is connected to a first word line comb, the first word line comb includes a plurality of fingers connected to a base, each of the first plurality of non-volatile storage elements is located at a far end of the plurality of fingers farthest from the base; and

performing a second memory array operation on a second plurality of non-volatile storage elements subsequent to performing the first memory array operation on the first plurality of non-volatile storage elements, the second plurality of non-volatile storage elements is connected to the first word line comb, each of the second plurality of non-volatile storage elements is located at a near end of the plurality of fingers closest to the base, the first plurality of non-volatile storage elements comprises a first number of non-volatile storage elements and the second plurality of non-volatile storage elements comprises a second number of non-volatile storage elements greater than the first number of non-volatile storage elements.

2. The method of claim 1 , further comprising:

performing a third memory array operation on a third plurality of non-volatile storage elements subsequent to performing the first memory array operation on the first plurality of non-volatile storage elements, the third plurality of non-volatile storage elements is connected to the first word line comb, each of the third plurality of non-volatile storage elements is located between the first plurality of non-volatile storage elements and the second plurality of non-volatile storage elements.

3. The method of claim 2 , wherein:

the third plurality of non-volatile storage elements comprises a third number of non-volatile storage elements greater than the first number of non-volatile storage elements and less than the second number of non-volatile storage elements.

4. The method of claim 1 , wherein:

the first memory array operation comprises a non-data pattern memory array operation.

5. The method of claim 4 , wherein:

the non-data pattern memory array operation comprises a forming operation.

6. The method of claim 1 , wherein:

the first memory array operation comprises one of a forming operation or an erase operation.

7. The method of claim 1 , wherein:

the performing a first memory array operation includes applying a first voltage across each non-volatile storage element of the first plurality of non-volatile storage elements while limiting the current through each non-volatile storage element of the first plurality of non-volatile storage elements to a first current limit; and

the performing a second memory array operation includes applying a second voltage across each non-volatile storage element of the second plurality of non-volatile storage elements while limiting the current through each non-volatile storage element of the second plurality of non-volatile storage elements to a second current limit different from the first current limit.

8. The method of claim 1 , wherein:

the performing a first memory array operation includes applying a first voltage across each non-volatile storage element of the first plurality of non-volatile storage elements; and

the performing a second memory array operation includes applying a second voltage across each non-volatile storage element of the second plurality of non-volatile storage elements, the second voltage is less than the first voltage.

9. The method of claim 1 , wherein:

the first plurality of non-volatile storage elements comprises ReRAM memory cells; and

the first plurality of non-volatile storage elements is part of a memory array, the memory array comprises a three-dimensional memory array.

10. The method of claim 1 , wherein:

the first plurality of non-volatile storage elements is part of a memory array, the memory array is monolithically formed in one or more physical levels of memory cells having active areas disposed above a silicon substrate.

11. A non-volatile storage system, comprising:

a memory array, the memory array includes a first plurality of non-volatile storage elements and a second plurality of non-volatile storage elements, the first plurality of non-volatile storage elements is connected to a first word line comb, the first word line comb includes a plurality of fingers connected to a base, each of the first plurality of non-volatile storage elements is located at a far end of the plurality of fingers farthest from the base, the second plurality of non-volatile storage elements is connected to the first word line comb, each of the second plurality of non-volatile storage elements is located at a near end of the plurality of fingers closest to the base, the first plurality of non-volatile storage elements comprises a first number of non-volatile storage elements and the second plurality of non-volatile storage elements comprises a second number of non-volatile storage elements greater than the first number of non-volatile storage elements; and

one or more control circuits in communication with the memory array, the one or more control circuits configured to cause a first memory array operation to be performed on the first plurality of non-volatile storage elements and a second memory array operation to be performed on the second plurality of non-volatile storage elements.

12. The non-volatile storage system of claim 11 , wherein:

the memory array includes a third plurality of non-volatile storage elements, the third plurality of non-volatile storage elements is connected to the first word line comb, each of the third plurality of non-volatile storage elements is located between the first plurality of non-volatile storage elements and the second plurality of non-volatile storage elements.

13. The non-volatile storage system of claim 12 , wherein:

the third plurality of non-volatile storage elements comprises a third number of non-volatile storage elements greater than the first number of non-volatile storage elements and less than the second number of non-volatile storage elements.

14. The non-volatile storage system of claim 11 , wherein:

the first memory array operation comprises a non-data pattern memory array operation.

15. The non-volatile storage system of claim 14 , wherein:

the non-data pattern memory array operation comprises a forming operation.

16. The non-volatile storage system of claim 11 , wherein:

the first memory array operation comprises one of a forming operation or an erase operation.

17. The non-volatile storage system of claim 11 , wherein:

the first memory array operation includes applying a first voltage across each non-volatile storage element of the first plurality of non-volatile storage elements; and

the second memory array operation includes applying a second voltage across each non-volatile storage element of the second plurality of non-volatile storage elements, the second voltage is less than the first voltage.

18. The non-volatile storage system of claim 11 , wherein:

the first plurality of non-volatile storage elements comprises ReRAM memory cells; and

the first plurality of non-volatile storage elements is part of a memory array, the memory array comprises a three-dimensional memory array.

19. A method for operating a non-volatile storage system, comprising:

performing a first forming operation on a first group of non-volatile storage elements, the first group of non-volatile storage elements is connected to a first word line comb, the first word line comb includes a plurality of fingers connected to a base, the first group of non-volatile storage elements includes a first storage element located at a far end of a first finger of the plurality of fingers and a second storage element located at a far end of a second finger of the plurality of fingers; and

performing a second forming operation on a second group of non-volatile storage elements subsequent to performing the first forming operation on the first group of non-volatile storage elements, the second group of non-volatile storage elements is connected to the first word line comb, the second group of non-volatile storage elements includes a third storage element located at a near end of the first finger and a fourth storage element located at a near end of the second finger, the first group of non-volatile storage elements comprises a first number of non-volatile storage elements and the second group of non-volatile storage elements comprises a second number of non-volatile storage elements greater than the first number of non-volatile storage elements.

20. The method of claim 19 , wherein:

the first group of non-volatile storage elements comprises ReRAM memory cells; and

the first group of non-volatile storage elements is part of a memory array, the memory array comprises a three-dimensional memory array.

Assignments (4)
CHANGE OF NAME Recorded May 25, 2016
From: SANDISK TECHNOLOGIES INC
To: SANDISK TECHNOLOGIES LLC
Reel/Frame 038812/0954 →
CORRECTIVE ASSIGNMENT TO CORRECT THE INCORRECT LISTED PATENT NUMBER 8853569 TO THE CORRECT PATENT NUMBER 8883569 PREVIOUSLY RECORDED ON REEL 038300 FRAME 0665. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Apr 25, 2016
From: SANDISK 3D LLC
To: SANDISK TECHNOLOGIES INC.
Reel/Frame 038520/0552 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 30, 2016
From: SANDISK 3D LLC.
To: SANDISK TECHNOLOGIES INC.
Reel/Frame 038300/0665 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 23, 2015
From: SIAU, CHANG; YAN, TIANHONG
To: SANDISK 3D LLC
Reel/Frame 035881/0872 →
Continuity (3)
Continuation 14246052 · Apr 5, 2014
Provisional Application 61809206 · Apr 5, 2013
Related Publication 20150269998A1 · Sep 24, 2015