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App. No. 14/753,198 · Confirmation No. 1799

METHODS INCLUDING A PROCESSING OF WAFERS AND SPIN COATING TOOL

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2017-04-26 ISSUE.NTF Issue Notification 1 View
2017-04-06 IFEE Issue Fee Payment (PTO-85B) 1 View
2017-04-06 N427 Post Allowance Communication - Incoming 1 View
2017-04-06 WFEE Fee Worksheet (SB06) 2 View
2017-04-06 N417 Electronic Filing System Acknowledgment Receipt 2 View
2017-02-08 NOA Notice of Allowance and Fees Due (PTOL-85) 15 View
2017-02-08 INTV.SUM.EX Examiner initiated interview summary (PTOL-413B) 1 View
2017-02-08 892 List of references cited by examiner 1 View
2017-02-08 SRNT Examiner's search strategy and results 11 View
2017-02-08 BIB Bibliographic Data Sheet 1 View
2017-02-08 SRFW Search information including classification, databases and other search related notes 2 View
2017-02-08 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 3 View
2016-12-29 NTC.PUB Notice of Publication 1 View
2016-10-31 WFEE Fee Worksheet (SB06) 1 View
2016-10-31 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2016-10-31 CLM Claims 6 View
2016-10-31 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2016-10-31 N417 Electronic Filing System Acknowledgment Receipt 2 View
2016-09-20 CTNF Non-Final Rejection 17 View
2016-09-20 892 List of references cited by examiner 1 View
2016-09-20 SRFW Search information including classification, databases and other search related notes 1 View
2016-09-20 SRNT Examiner's search strategy and results 6 View
2016-06-20 ELC. Response to Election / Restriction Filed 2 View
2016-06-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2016-06-15 CTRS Requirement for Restriction/Election 8 View
2015-07-15 WFEE Fee Worksheet (SB06) 1 View
2015-07-15 APP.FILE.REC Filing Receipt 3 View
2015-06-29 ADS Application Data Sheet 6 View
2015-06-29 SPEC Specification 65 View
2015-06-29 CLM Claims 9 View
2015-06-29 ABST Abstract 1 View
2015-06-29 DRW Drawings-only black and white line drawings 10 View
2015-06-29 OATH Oath or Declaration filed 3 View
2015-06-29 WFEE Fee Worksheet (SB06) 2 View
2015-06-29 N417 Electronic Filing System Acknowledgment Receipt 3 View
2015-06-29 136A Authorization for Extension of Time all replies 3 View
2015-06-29 PA.. Power of Attorney 2 View
2015-06-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-06-29 OATH Oath or Declaration filed 5 View
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Quick Facts
App. No.
14/753,198
Filed
2015-06-29
Granted
2017-05-16
Pub. No.
US20160379900A1
Art Unit
2898
PTA
0 days