Method for improved fin profile
View Patent ↗A method can include performing an etching process to define a fin trench having a first depth, the first depth being less that a target height of fin. A method can also include forming a layer to protect sidewalls defining the fin trench. A method can also include performing a second etching process to increase a depth of fin trench.
1. A method comprising:
performing an etching process to form a fin trench having a first depth, the first depth being less than a target height of a fin and substantially equal to a target height of a channel region;
forming a hardmask layer to protect sidewalls defining the fin trench; and
performing a second etching process using a high aspect ratio etching process to selectively remove material of the hardmask layer at a bottom of the fin trench to increase a depth of the fin trench.
2. The method of claim 1 , wherein the performing the etching process includes using another hardmask layer having a pattern of the fin trench.
3. The method of claim 1 , wherein the performing the etching process includes using another hardmask layer having a pattern of the fin trench, the another hardmask layer formed using sidewall image transfer.
4. The method of claim 1 , wherein the forming the layer to protect includes forming material over the sidewalls defining the fin trench.
5. The method of claim 1 , wherein the forming the layer to protect includes forming the hardmask layer over the fin.
6. The method of claim 1 , wherein the forming the layer to protect includes conformally forming the hardmask layer over the fin.
7. The method of claim 1 , wherein the performing the second etching process includes using a reactive ion etch (RIE) process.
8. The method of claim 6 , wherein the hardmask layer comprises a sacrificial hardmask layer including a gap defined at the bottom of the fin trench.
9. The method of claim 6 , wherein the hardmask layer comprises a sacrificial hardmask layer including a gap defined at a fin top section of the hardmask layer.
10. The method of claim 6 , wherein the fin trench is formed within a substrate formed of silicon.
11. The method of claim 6 wherein the fin comprises:
a fin profile, wherein the fin profile is characterized by having a non-uniform fin taper angle; and wherein
a field effect transistor is formed on the fin.
12. The method of claim 11 , wherein the fin includes an elevation region characterized by a changing fin taper angle.
13. The method of claim 11 , wherein the fin includes an elevation region characterized by a changing fin taper angle, the elevation region being proximate a bottom of the channel region.
14. The method of claim 11 , wherein the fin includes an elevation region characterized by a changing fin taper angle, the elevation region being proximate a bottom of the channel region, the fin having a second elevation region above the elevation region, the second elevation region characterized by having a substantially uniform fin taper angle.
15. The method of claim 11 , wherein the fin includes an elevation region characterized by a changing fin taper angle, the elevation region being proximate a bottom of the channel region, the fin having a second elevation region above the elevation region, the second elevation region characterized by having a substantially uniform and substantially vertical fin taper angle.
16. The method of claim 11 , wherein the fin includes a first elevation region characterized by a first width and a second elevation region characterized by a second width.