Device resulting from printing minimum width semiconductor features at non-minimum pitch
Methods for forming a semiconductor layer, such as a metal1 layer, having minimum width features separated by a distance greater than a minimum pitch, and the resulting devices are disclosed. Embodiments may include determining a first shape and a second shape having a minimum width within a semiconductor layer, wherein a distance between the first shape and the second shape is greater than a minimum pitch, determining an intervening shape between the first shape and the second shape, and designating a dummy shape within the intervening shape, wherein the dummy shape is at the minimum pitch from the first shape.
1. An apparatus comprising:
a semiconductor layer comprising a dummy shape, a first shape and a second shape,
wherein the first shape has a minimum width within the semiconductor layer that is greater than a minimum pitch from the second shape having the minimum width,
the dummy shape is provided in an intervening shape between the first shape and the second shape, and
the dummy shape is at the minimum pitch from the first shape and the second shape and is at least the minimum width.
2. The apparatus according to claim 1 , wherein the dummy shape comprises a first portion and a second portion, the first portion being at the minimum pitch from the first shape and the second portion being at the minimum pitch from the second shape.
3. The apparatus according to claim 1 , wherein the semiconductor layer is a metal1 (M1) layer.
4. The apparatus according to claim 1 , wherein the semiconductor layer is formed by patterning a first hardmask according to the first shape, the second shape and the dummy shape during a first lithography-etch step.
5. The apparatus according to claim 4 , wherein the semiconductor layer is formed by patterning a second hardmask according to the intervening shape during a second lithography-etch step.
6. The apparatus according to claim 1 , the minimum width is 32 nm.
7. The apparatus according to claim 1 , the minimum pitch is 128 nm.