IP Library Granted Patent US 9,940,986
Granted Patent B2
US 9,940,986 · App. 14/971,644 · Granted Apr 10, 2018

Electrostatic discharge protection structures for eFuses

Inventors: Alain F. Loiseau (Williston, VT); Joseph M. Lukaitis (Pleasant Valley, NY); Ephrem G. Gebreselasie (South Burlington, VT); Richard A. Poro (Bristol, VT); Andreas D. Stricker (Essex Junction, VT); Ahmed Y. Ginawi (South Burlington, VT)
Assignee: GLOBALFOUNDRIES INC.
G11C7/24G11C5/005G11C17/16H01L23/5256H01L27/0255H01L27/0266H01L27/0617H01L27/11206
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Quick Facts
Patent No.
US 9,940,986
App. No.
14/971,644
Granted
Apr 10, 2018
Kind
B2
Abstract

The present disclosure relates to semiconductor structures and, more particularly, to electrostatic discharge (ESD) protection structures for eFuses. The structure includes an electrostatic discharge (ESD) protection structure operatively coupled to an eFuse, which is structured to prevent unintentional programming of the eFuse due to an ESD event originating at a source.

Claims (29)

1. A structure comprising an electrostatic discharge (ESD) protection structure operatively coupled to an eFuse, the ESD protection structure being structured to prevent unintentional programming of the eFuse due to an ESD event originating at a source and a power clamp which is structured to protect the eFuse by discharging a positive pulse current.

2. The structure of claim 1 , wherein the ESD protection structure is a diode formed in parallel with the eFuse, wherein both terminals of the eFuse and the diode are each shared terminals.

3. The structure of claim 2 , wherein one of the terminals of the diode are directly coupled to the source.

4. The structure of claim 2 , wherein the diode is forward biased during the ESD event and reverse biased during normal operation.

5. The structure of claim 4 , wherein the diode is clamped during a negative pulse such that parasitic current from a FET network will not unintentionally program the eFuse.

6. The structure of claim 1 , wherein the ESD protection structure is a diode formed in series with the eFuse.

7. The structure of claim 6 , wherein the diode is reverse biased during the ESD event and forward biased during normal operations.

8. The structure of claim 7 , wherein the diode prevents a voltage from forming across the eFuse above its threshold.

9. The structure of claim 6 , wherein the diode is coupled in series to a bank of eFuses.

10. The structure of claim 6 , wherein the diode is between the eFuse and a FET network.

11. The structure of claim 1 , wherein one of:

the ESD protection structure is a FET in parallel with the eFuse; and

the ESD protection structure is a FET in series with the eFuse, where a terminal of the FET is connected to the source.

12. The structure of claim 1 , further comprising a diode in parallel with the power clamp, the diode absorbing a negative ESD event originating from the source to protect the eFuse during a negative pulse originating from the source by turning on and allowing current on the eFuse to stay low.

13. A structure, comprising:

an eFuse connected between a terminal potentially exposed to an ESD source and a FET network having a parasitic current upon an occurrence of an ESD event;

an ESD protection structure coupled to the eFuse which is structured to prevent negative pulses originating at the ESD source from unintentionally programming the eFuse;

a power clamp which is structured to protect the eFuse by discharging a positive pulse current; and

a diode in parallel with the power clamp, which is structured to protect the eFuse by discharging a negative pulse current.

14. The structure of claim 13 , wherein the ESD protection structure is a diode formed in parallel with the eFuse, wherein both terminals of the eFuse and the diode are each shared terminals.

15. The structure of claim 14 , wherein the diode is forward biased during the ESD event and reverse biased during normal operation.

16. The structure of claim 13 , wherein:

the ESD protection structure is a diode formed in series with the eFuse;

the diode is reverse biased during an ESD event and forward biased during normal operations; and

the diode prevents a voltage from forming across the eFuse above its threshold.

17. The structure of claim 16 , wherein the diode is coupled in series to a bank of eFuses.

18. The structure of claim 13 , wherein the ESD protection structure is a FET in parallel with the eFuse.

19. The structure of claim 13 , wherein the ESD protection structure is a FET in series with the eFuse, where a terminal of the FET is connected to the source.

20. A method comprising, during an ESD event, diverting of a parasitic current originating at a FET network from an eFuse to a forward biased diode to discharge a negative pulse current such that the eFuse will not be unintentionally programmed and a power clamp which protects the eFuse by discharging a positive pulse current.

Assignments (7)
RELEASE OF SECURITY INTEREST Recorded Nov 20, 2020
From: WILMINGTON TRUST, NATIONAL ASSOCIATION
To: GLOBALFOUNDRIES INC.
Reel/Frame 054636/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 16, 2020
From: CAVIUM INTERNATIONAL
To: MARVELL ASIA PTE, LTD.
Reel/Frame 053475/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 20, 2020
From: MARVELL INTERNATIONAL LTD.
To: CAVIUM INTERNATIONAL
Reel/Frame 052918/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 20, 2019
From: GLOBALFOUNDRIES U.S. INC.
To: MARVELL INTERNATIONAL LTD.
Reel/Frame 051070/0625 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 21, 2019
From: GLOBALFOUNDRIES INC.
To: GLOBALFOUNDRIES U.S. INC.
Reel/Frame 050122/0001 →
SECURITY AGREEMENT Recorded Nov 29, 2018
From: GLOBALFOUNDRIES INC.
To: WILMINGTON TRUST, NATIONAL ASSOCIATION
Reel/Frame 049490/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 16, 2015
From: LOISEAU, ALAIN F.; LUKAITIS, JOSEPH M.; GEBRESELASIE, EPHREM G.; PORO, RICHARD A.; STRICKER, ANDREAS D.; GINAWI, AHMED Y.
To: GLOBALFOUNDRIES INC.
Reel/Frame 037309/0368 →
Continuity (1)
Related Publication 20170178704A1 · Jun 22, 2017