Integrated circuits with spacer chamfering and methods of spacer chamfering
Semiconductor devices and methods for forming the devices with spacer chamfering. One method includes, for instance: obtaining a wafer with at least one source, at least one drain, and at least one fin; forming at least one sacrificial gate with at least one barrier layer; forming a first set of spacers adjacent to the at least one sacrificial gate; forming at least one second set of spacers adjacent to the first set of spacers; and etching to remove a portion of the first set of spacers above the at least one barrier layer to form a widened opening. An intermediate semiconductor device is also disclosed.
1. An intermediate semiconductor device comprising:
a substrate;
at least one source and at least one drain positioned on the substrate;
at least one fin connecting the at least one source and the at least one drain;
at least one portion of a sacrificial gate, wherein the portion comprises:
a polysilicon layer; and
a barrier layer positioned over the polysilicon layer;
a first set of spacers positioned adjacent to the polysilicon layer and the barrier layer of the sacrificial gate;
at least one second set of spacers positioned adjacent to the first set of spacers on a side opposite the at least one portion of the sacrificial gate; and
a portion of a gate contact opening positioned over the first set of spacers and the barrier layer;
wherein the portion of the gate contact opening engages a top surface of the first set of spacers, a bottom surface is opposite the top surface over the substrate, an interior surface contacts the at least one portion of the sacrificial gate, and an exterior surface is opposite the interior surface;
wherein the top surface of the first set of spacers is positioned between a top surface and a bottom surface of the second set of spacers and the at least one second set of spacers engages at least a portion of the exterior surface of the first set of spacers.
2. The device of claim 1 , further comprising:
an epitaxial layer positioned between at least one of the first set of spacers and the at least one second set of spacers.
3. The device of claim 2 , wherein the bottom surface of the second set of spacers is positioned on a top surface of the epitaxial layer.
4. The device of claim 2 , wherein the epitaxial layer is positioned adjacent to the second set of spacers.
5. The device of claim 3 , wherein the barrier layer is positioned at a height above a top surface of the epitaxial layer.
6. The device of claim 4 , wherein the barrier layer is positioned at a height below a top surface of the epitaxial layer.
7. The device of claim 2 , wherein the portion of the gate contact opening is separated from the epitaxial layer by at least the at least one second set of spacers.
8. The device of claim 1 , further comprising:
an epitaxial layer positioned between the first set of spacers.
9. The device of claim 8 , wherein the top surface of the first set of spacers has a height from the sacrificial gate that is greater than a height of a top surface of the epitaxial layer from the sacrificial gate.
10. The device of claim 9 , wherein the top surface of the at least one second set of spacers has a height from the sacrificial gate that is greater than the height of the top surface of the epitaxial layer.
11. The device of claim 1 , further comprising:
an epitaxial layer positioned between the at least one second set of spacers.
12. The device of claim 11 , wherein the top surface of the first set of spacers has a height from the sacrificial gate that is less than a height of a top surface of the epitaxial layer from the sacrificial gate.
13. The device of claim 12 , wherein the top surface of the at least one second set of spacers has a height from the sacrificial gate that is greater than the height of the top surface of the epitaxial layer.
14. The device of claim 1 , wherein the portion of the gate contact opening is positioned between the second set of spacers and over the first set of spacers.
15. The device of claim 8 , wherein the portion of the gate contact opening is positioned between the second set of spacers and over the first set of spacers.
16. The device of claim 11 , wherein the portion of the gate contact opening is positioned between the second set of spacers and over the first set of spacers.