Symmetrical lateral bipolar junction transistor and use of same in characterizing and protecting transistors
A symmetrical lateral bipolar junction transistor (SLBJT) is provided. The SLBJT includes a p-type semiconductor substrate, a n-type well, an emitter of a SLBJT situated in the n-type well, a base of the SLBJT situated in the n-type well and spaced from the emitter by a distance on one side of the base, a collector of the SLBJT situated in the n-type well and spaced from the base by the distance on an opposite side of the base, and an electrical connection to the substrate outside the n-type well. The SLBJT is used to characterize a transistor in a circuit by electrically coupling the SLBJT to a gate of the test transistor, applying a voltage to the gate, and characterizing aspect(s) of the test transistor under the applied voltage. The SLBJT protects the gate against damage to the gate dielectric.
1. A symmetrical lateral bipolar junction transistor (SLBJT), comprising:
a p-type semiconductor substrate;
at least one well;
a first implant region of a first type for an emitter of a symmetrical lateral bipolar junction transistor (SLBJT), the first implant region being situated in one of the at least one well and the first type being one of n-type and p-type;
a second implant region of a second type opposite the first type for a base of the SLBJT, the second implant region being situated in the at least one well and spaced from the emitter on a first side of the base by a distance and an isolation region;
a third implant region of the first type for a collector of the SLBJT, the third implant region being situated in the at least one well and spaced from the base on a second side of the base opposite the first side by the distance and an isolation region; and
a p-type implant region for electrically coupling to the substrate, the p-type implant region being situated outside the at least one well.
2. The SLBJT of claim 1 , further comprising a p-type fin coupled to the substrate, wherein the at least one well, the SLBJT and the substrate implant region are situated in the fin.
3. The SLBJT of claim 2 , wherein the at least one well comprises a n-type well, wherein the emitter, the collector and a contact for the substrate each comprises p-type epitaxial material over the respective implant regions, wherein the base comprises n-type epitaxial material over the second implant region, and wherein the implant regions for the emitter, base and collector are situated in the n-type well.
4. The SLBJT of claim 2 , wherein the at least one well comprises a p-type well within a n-type well and a triple n-type well below the p-type well and n-type well, wherein the emitter and the collector each comprises n-type epitaxial material over the respective implant regions, wherein the base and a contact for the substrate each comprises p-type epitaxial material over the respective implant regions, and wherein the implant regions for the emitter, base and collector are situated in the p-type well.
5. The SLBJT of claim 1 , wherein the at least one well comprises a n-type well, wherein the n-type well and the implant region for the substrate are situated in the substrate, and wherein the first implant region, the third implant region and the substrate implant region each comprises a p-type implant and the second implant region comprises a n-type implant.
6. The SLBJT of claim 1 , wherein the at least one well and the implant region for the substrate are situated in the substrate, wherein the at least one well comprises a p-type well within a n-type well and a triple n-type well below the p-type well and n-type well, wherein the first implant region and the third implant region each comprises a n-type implant, and wherein the second implant region and substrate implant region each comprises a p-type implant.
7. The SLBJT of claim 1 , wherein the distance comprises about 0.2 microns to about 5 microns.
8. The SLBJT of claim 1 , wherein each of the implant regions has a depth of about 0.1 microns to about 3 microns.
9. The SLBJT of claim 1 , wherein the SLBJT has a breakdown voltage of one of about 9 volts and about 12 volts.