Method for manufacturing a transistor having a sharp junction by forming raised source-drain regions before forming gate regions and corresponding transistor produced by said method
A transistor is fabricated by growing an epitaxial layer of semiconductor material on a semiconductor layer and forming an opening extending through the epitaxial layer at the gate location. This opening provides, from the epitaxial layer, a source epitaxial region on one side of the opening and a drain epitaxial region on an opposite side of the opening. The source epitaxial region and a first portion of the semiconductor layer underlying the source epitaxial region are annealed into a single crystal transistor source region. Additionally, the drain epitaxial region and a second portion of the semiconductor layer underlying the drain epitaxial region are annealed into a single crystal transistor drain region. A third portion of the semiconductor layer between the transistor source and drain regions forms a transistor channel region. A transistor gate electrode is then formed in the opening above the transistor channel region.
1. A method, comprising:
on a bulk substrate, repeating epitaxial processes to grow a first stack of alternating semiconductor stress release buffer and semiconductor defect cap layers;
epitaxially growing a defect free and fully stress released semiconductor layer on top of an uppermost one of the semiconductor defect cap layers in the first stack, the defect free and fully stress released semiconductor layer having a first thickness;
bonding a wafer to an upper surface of the defect free and fully stress released semiconductor layer, said wafer comprising a second stack of an insulator layer and a semiconductor layer, wherein the insulator layer is bonded to the defect free and fully stress released semiconductor layer;
epitaxially growing a doped semiconductor layer on the semiconductor layer of said wafer; and
removing at least the insulator layer to form a cavity underneath the semiconductor layer of said wafer and the doped semiconductor layer.
2. The method of claim 1 , further comprising:
forming a transistor source and a transistor drain of a transistor from the semiconductor layer of said wafer and the doped semiconductor layer; and
forming a channel region of the transistor from the doped semiconductor layer.
3. The method of claim 2 , wherein forming the transistor source and the transistor drain comprises:
forming an opening extending through the doped semiconductor layer to define a source region and a drain region;
performing an anneal of the source region and a portion of the semiconductor layer of said wafer below the source region to form said transistor source; and
performing an anneal of the drain region and a portion of the semiconductor layer of said wafer below the drain region to form said transistor drain.
4. The method of claim 3 , further comprising forming a gate structure for the transistor in said opening.
5. The method of claim 1 , wherein the first stack of alternating semiconductor stress release buffer and semiconductor defect cap layers includes at least two semiconductor stress release buffer layers and at least two semiconductor defect cap layers.
6. The method of claim 1 , wherein each semiconductor stress release buffer layer is made of silicon-germanium and each semiconductor defect cap layer is made of silicon.
7. The method of claim 6 , wherein the first stack of alternating semiconductor stress release buffer and semiconductor defect cap layers includes at least two semiconductor stress release buffer layers and at least two semiconductor defect cap layers.
8. The method of claim 6 , further comprising:
forming a transistor source and a transistor drain of a transistor from the semiconductor layer of said wafer and the doped semiconductor layer; and
forming a channel region of the transistor from the doped semiconductor layer.
9. The method of claim 8 , wherein forming the transistor source and the transistor drain comprises:
forming an opening extending through the doped semiconductor layer to define a source region and a drain region;
performing an anneal of the source region and a portion of the semiconductor layer of said wafer below the source region to form said transistor source; and
performing an anneal of the drain region and a portion of the semiconductor layer of said wafer below the drain region to form said transistor drain.
10. The method of claim 9 , further comprising forming a gate structure for the transistor in said opening.
11. The method of claim 6 , wherein the doped semiconductor layer is made of silicon-germanium.
12. The method of claim 1 , wherein the doped semiconductor layer is made of silicon-germanium.
13. A method, comprising:
epitaxially growing a defect free and fully stress released silicon-germanium layer supported by a substrate;
bonding a wafer to an upper surface of the defect free and fully stress released silicon-germanium layer, said wafer comprising an insulator layer and a semiconductor layer, wherein the insulator layer is bonded to the defect free and fully stress released silicon-germanium layer;
epitaxially growing a doped semiconductor layer on the semiconductor layer of said wafer;
removing the insulating layer of said wafer to form a cavity underneath the semiconductor layer of said wafer;
forming a transistor source and a transistor drain of a transistor from the semiconductor layer of said wafer and the doped semiconductor layer;
forming a channel region of the transistor from the doped semiconductor layer; and
forming a gate structure for the transistor.
14. The method of claim 13 , wherein forming the transistor source and the transistor drain comprises:
forming an opening extending through the doped semiconductor layer to define a source region and a drain region;
performing an anneal of the source region and a portion of the semiconductor layer below the source region to form said transistor source; and
performing an anneal of the drain region and a portion of the semiconductor layer below the drain region to form said transistor drain.
15. The method of claim 14 , wherein forming the gate structure for the transistor comprises forming the gate structure in said opening.
16. The method of claim 13 , wherein the substrate includes a stack of layers including at least one semiconductor stress release buffer layer and at least one semiconductor defect cap layer.
17. The method of claim 16 , wherein the semiconductor stress release buffer layer is made of silicon-germanium and the semiconductor defect cap layer is made of silicon.
18. The method of claim 16 , wherein epitaxially growing the defect free and fully stress released silicon-germanium layer comprises growing the defect free and fully stress released silicon-germanium layer from the semiconductor defect cap layer.
19. The method of claim 13 , wherein the doped semiconductor layer is made of silicon-germanium.