Semiconductor device and method of forming protrusion e-bar for 3D SiP
A semiconductor device has a first substrate and a semiconductor die disposed over the first substrate. A second substrate has a multi-layered conductive post. The conductive post has a first conductive layer and a second conductive layer formed over the first conductive layer. The first conductive layer is wider than the second conductive layer. A portion of the conductive post can be embedded within the second substrate. The second substrate is disposed over the first substrate adjacent to the semiconductor die. An encapsulant is deposited around the second substrate and semiconductor die. An opening is formed in the second substrate aligned with the conductive post. An interconnect structure is formed in the opening to contact the conductive post. A discrete electrical component is disposed over a surface of the first substrate opposite the semiconductor die. A shielding layer is formed over the discrete electrical component.
1. A semiconductor device, comprising:
a first interconnect substrate;
a semiconductor die disposed over the first interconnect substrate;
a second substrate including a stepped e-bar conductive post comprising a first conductive layer and a second conductive layer formed over the first conductive layer with the first conductive layer being wider than the second conductive layer, wherein the second conductive layer is disposed completely within boundaries of the first conductive layer and protrudes beyond a first surface of the second substrate and the second substrate is disposed over the first interconnect substrate with a via formed completely through the second substrate and aligned with the stepped e-bar conductive post; and
an interconnect structure disposed within the via to contact the stepped e-bar conductive post and extending beyond a second surface of the second substrate opposite the first surface of the second substrate.
2. The semiconductor device of claim 1 , further including an encapsulant deposited around the second substrate and semiconductor die.
3. The semiconductor device of claim 1 , wherein a portion of the first conductive layer of the stepped e-bar conductive post is embedded within the second substrate.
4. The semiconductor device of claim 1 , further including a semiconductor package disposed over the semiconductor device.
5. The semiconductor device of claim 1 , further including a discrete electrical component disposed over a surface of the first interconnect substrate opposite the semiconductor die.
6. The semiconductor device of claim 5 , further including a shielding layer formed over the discrete electrical component.
7. A semiconductor device, comprising:
a substrate including a stepped e-bar conductive post comprising a base and a first step from the base disposed completely within boundaries of the base, wherein the stepped e-bar conductive post extends beyond a surface of the substrate and a portion of the stepped e-bar conductive post is embedded within the substrate;
a semiconductor die disposed adjacent to the substrate with an opening extending completely through the substrate to the stepped e-bar conductive post;
a bonding material disposed over the first step; and
an interconnect structure disposed within the opening to contact the stepped e-bar conductive post.
8. The semiconductor device of claim 7 , further including an encapsulant deposited around the substrate and semiconductor die.
9. The semiconductor device of claim 7 , further including a semiconductor package disposed over the semiconductor device.
10. The semiconductor device of claim 7 , further including a discrete electrical component disposed over a surface of the substrate opposite the semiconductor die.
11. The semiconductor device of claim 10 , further including a shielding layer formed over the discrete electrical component.
12. The semiconductor device of claim 7 , wherein the stepped e-bar conductive post includes:
a first conductive layer; and
a second conductive layer formed over the first conductive layer, wherein the first conductive layer is wider than the second conductive layer.
13. A semiconductor device, comprising:
a first interconnect substrate;
a semiconductor die disposed over the first interconnect substrate;
a second substrate including a stepped e-bar conductive post comprising a base and a first step from the base disposed completely within the base, wherein the stepped e-bar conductive post protrudes from a surface of the second substrate and is disposed over the first interconnect substrate and a portion of the stepped e-bar conductive post is embedded within the second substrate;
a bonding material disposed over the first step; and
an interconnect structure disposed within an opening formed completely through the second substrate and aligned with the stepped e-bar conductive post to contact the stepped e-bar conductive post.
14. The semiconductor device of claim 13 , further including an encapsulant deposited around the second substrate and semiconductor die.
15. The semiconductor device of claim 13 , wherein the stepped e-bar conductive post includes:
a first conductive layer; and
a second conductive layer formed over the first conductive layer, wherein the first conductive layer is wider than the second conductive layer.
16. The semiconductor device of claim 13 , further including a discrete electrical component disposed over a surface of the first interconnect substrate opposite the semiconductor die.
17. The semiconductor device of claim 16 , further including a shielding layer formed over the discrete electrical component.
18. A semiconductor device, comprising:
a substrate including a stepped e-bar conductive post comprising a base and a first step disposed completely within the base, wherein the stepped e-bar conductive post extends from a surface of the substrate and a portion of the stepped e-bar conductive post is embedded within the substrate;
a semiconductor die disposed adjacent to the substrate;
a bonding material disposed over the first step; and
an interconnect structure disposed within an opening extending completely through the substrate to contact the stepped e-bar conductive post.
19. The semiconductor device of claim 18 , further including an encapsulant deposited around the substrate and semiconductor die.
20. The semiconductor device of claim 18 , further including a discrete electrical component disposed over a surface of the substrate opposite the semiconductor die.
21. The semiconductor device of claim 20 , further including a shielding layer formed over the discrete electrical component.
22. The semiconductor device of claim 18 , wherein the stepped e-bar conductive post includes:
a first conductive layer; and
a second conductive layer formed over the first conductive layer, wherein the first conductive layer is wider than the second conductive layer.