Semiconductor devices with single-photon avalanche diodes and light spreading lenses
An imaging device may include single-photon avalanche diodes (SPADs). The single-photon avalanche diodes may be arranged in a one-dimensional or two-dimensional array in a SPAD-based semiconductor device. The SPAD-based semiconductor device may also include a transparent cover glass that is formed over the array of SPADs. Each line of SPADs within the SPAD-based semiconductor device may be covered by a respective light spreading lens. The light spreading lens may be formed as a groove in an upper surface of the transparent cover glass. The light spreading lens may have a uniform cross-section along its length. The light spreading lens may be formed as a convex lens on an upper or lower surface of the transparent cover glass.
1. A semiconductor device comprising:
a semiconductor substrate that includes a plurality of single-photon avalanche diodes;
a glass layer that covers the semiconductor substrate; and
a groove in the glass layer that overlaps the plurality of single-photon avalanche diodes, wherein the groove receives incident light distributed across a first width and spreads the light to be distributed across a second width at the plurality of single-photon avalanche diodes and wherein the second width is greater than the first width.
2. The semiconductor device defined in claim 1 , wherein the groove has a concave cross-section and is formed in an upper surface of the glass layer.
3. The semiconductor device defined in claim 1 , wherein the groove has a width and a length that is longer than the width and wherein the groove has a uniform cross-section along the length.
4. The semiconductor device defined in claim 1 , further comprising:
an array of microlenses, wherein each microlens is formed over a respective single-photon avalanche diode.
5. The semiconductor device defined in claim 1 , wherein the semiconductor substrate and the glass layer are separated by an air gap.
6. The semiconductor device defined in claim 1 , wherein the glass layer has first and second opposing surfaces, wherein the second surface is interposed between the first surface and the semiconductor substrate, and wherein the groove is formed in the first surface.
7. The semiconductor device defined in claim 6 , wherein the semiconductor substrate and the glass layer are separated by an air-filled gap.
8. The semiconductor device defined in claim 1 , wherein the plurality of single-photon avalanche diodes is arranged in a line.
9. A semiconductor device comprising:
a semiconductor substrate that includes a plurality of single-photon avalanche diodes;
a glass layer that covers the semiconductor substrate; and
a groove in the glass layer that overlaps the plurality of single-photon avalanche diodes, wherein the plurality of single-photon avalanche diodes is arranged in a line and wherein the groove extends parallel to the line.
10. The semiconductor device defined in claim 1 , wherein the groove spreads the light along a first dimension without spreading the light along a second dimension that is perpendicular to the first dimension.
11. A semiconductor device comprising:
a semiconductor substrate that includes a plurality of single-photon avalanche diodes;
a glass layer that covers the semiconductor substrate; and
a groove in the glass layer that overlaps the plurality of single-photon avalanche diodes, wherein the groove is formed in a planar surface of the glass layer.
12. The semiconductor device defined in claim 11 , wherein the groove receives incident light distributed across a third width and spreads the light to be distributed across a fourth width at the plurality of single-photon avalanche diodes and wherein the fourth width is greater than the third width.
13. The semiconductor device defined in claim 11 , wherein the groove has a width and a length that is longer than the width.
14. The semiconductor device defined in claim 13 , wherein the groove has a uniform cross-section along the length.
15. The semiconductor device defined in claim 11 , wherein the plurality of single-photon avalanche diodes is arranged in a line and wherein the groove extends parallel to the line.
16. The semiconductor device defined in claim 11 , wherein the glass layer has a first width and wherein the groove has a second width that is less than the first width.
17. The semiconductor device defined in claim 9 , wherein the groove receives incident light distributed across a first width and spreads the light to be distributed across a second width at the plurality of single-photon avalanche diodes and wherein the second width is greater than the first width.
18. The semiconductor device defined in claim 9 , wherein the groove has a width and a length that is longer than the width and wherein the groove has a uniform cross-section along the length.
19. The semiconductor device defined in claim 9 , wherein the groove is formed in a planar surface of the glass layer.
20. The semiconductor device defined in claim 19 , wherein the glass layer has a first width and wherein the groove has a second width that is less than the first width.