Region-of-interest positioning for laser-assisted bonding
A semiconductor device is formed by providing a semiconductor die. A laser-assisted bonding (LAB) assembly is disposed over the semiconductor die. The LAB assembly includes an infrared (IR) camera. The IR camera is used to capture an image of the semiconductor die. Image processing is performed on the image to identify corners of the semiconductor die. Regions of interest (ROI) are identified in the image relative to the corners of the semiconductor die. Parameters can be used to control the size and location of the ROI relative to the respective corners. The ROI are monitored for temperature using the IR camera while LAB is performed.
1. A method of making a semiconductor device, comprising:
providing a semiconductor die;
disposing a laser-assisted bonding (LAB) assembly including an infrared (IR) camera over the semiconductor die;
capturing an image of the semiconductor die using the IR camera;
performing image processing on the image to identify corners of the semiconductor die; and
identifying regions of interest (ROI) in the image relative to the corners of the semiconductor die.
2. The method of claim 1 , further including identifying the ROI using input parameters for a distance of the ROI from respective corners of the semiconductor die.
3. The method of claim 2 , further including identifying the ROI using input parameters for a size of the ROI.
4. The method of claim 1 , further including:
providing a plurality of semiconductor die;
moving the LAB assembly over each semiconductor die to individually perform laser-assisted bonding; and
automatically identifying ROI for each semiconductor die after moving the LAB assembly to the respective semiconductor die.
5. The method of claim 1 , further including monitoring temperatures of the ROI using the IR camera while performing laser-assisted bonding with the LAB assembly.
6. The method of claim 1 , wherein performing image processing includes binarization.
7. A method of making a semiconductor device, comprising:
providing a semiconductor die;
capturing an infrared (IR) image of the semiconductor die using an IR camera;
performing image processing on the IR image to identify corners of the semiconductor die; and
identifying regions of interest (ROI) in the IR image relative to the corners of the semiconductor die.
8. The method of claim 7 , further including performing laser-assisted bonding (LAB) on the semiconductor die while monitoring temperatures of the ROI with the IR camera.
9. The method of claim 8 , further including depositing an encapsulant over the semiconductor die after performing LAB.
10. The method of claim 7 , further including capturing the IR image and identifying the ROI periodically.
11. The method of claim 7 , wherein performing image processing includes binarization.
12. The method of claim 7 , further including identifying the ROI using input parameters for a distance of the ROI from respective corners of the semiconductor die.
13. The method of claim 7 , further including identifying the ROI using input parameters for a size of the ROI.
14. A method of making a semiconductor device, comprising:
providing a semiconductor die;
capturing an image of the semiconductor die;
identifying a corner of the semiconductor die in the image; and
identifying a region of interest (ROI) in the image relative to the corner of the semiconductor die.
15. The method of claim 14 , further including identifying the ROI using an input parameter for a distance of the ROI from the corner of the semiconductor die.
16. The method of claim 14 , further including identifying the ROI using an input parameter for a size of the ROI.
17. The method of claim 14 , further including monitoring a temperature of the ROI while performing laser-assisted bonding on the semiconductor die.
18. The method of claim 17 , further including depositing an encapsulant over the semiconductor die after performing LAB.
19. The method of claim 14 , further including identifying the corner of the semiconductor die by performing image processing on the image.
20. The method of claim 14 , further including capturing the image and identifying the ROI periodically.
21. A semiconductor manufacturing device, comprising:
a laser-assisted bonding (LAB) assembly;
an infrared (IR) camera attached to the LAB assembly; and
a computer configured to find a corner of a semiconductor die in an image captured by the IR camera.
22. The semiconductor manufacturing device of claim 21 , wherein the computer is configured to calculate a region of interest (ROI) relative to the corner.
23. The semiconductor manufacturing device of claim 22 , further including a parameter defining a location of the ROI relative to the corner.
24. The semiconductor manufacturing device of claim 23 , further including a parameter defining a size of the ROI.
25. The semiconductor manufacturing device of claim 21 , further including a semiconductor die disposed under the LAB assembly.