IP Library › Patent Application 60344191
Patent Application Provisional
App. No. 60/344,191 · Confirmation No. 1294

Treatment of dielectric material to enhance etch rate

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2001-12-28 TRNA Transmittal of New Application 3 View
2001-12-28 SPEC Specification 12 View
2001-12-28 CLM Claims 3 View
2001-12-28 ABST Abstract 1 View
2001-12-28 DRW Drawings-only black and white line drawings 4 View
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Quick Facts
App. No.
60/344,191
Filed
2001-12-28