IP Library › Patent Application 61057485
Patent Application Provisional
App. No. 61/057,485 · Confirmation No. 3719

CONTROL OF PARTICLES ON SEMICONDUCTOR WAFERS WHEN IMPLANTING BORON HYDRIDES

Inventor: Andrew M. Ray
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2008-07-17 APP.FILE.REC Filing Receipt 3 View
2008-05-30 TR.PROV Provisional Cover Sheet (SB16) 2 View
2008-05-30 SPEC Specification 22 View
2008-05-30 CLM Claims 5 View
2008-05-30 ABST Abstract 1 View
2008-05-30 DRW Drawings-only black and white line drawings 4 View
2008-05-30 WFEE Fee Worksheet (SB06) 2 View
2008-05-30 N417 Electronic Filing System Acknowledgment Receipt 3 View
2008-05-30 TR.PROV Provisional Cover Sheet (SB16) 2 View
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Quick Facts
App. No.
61/057,485
Filed
2008-05-30