Patent Application
Provisional
App. No. 62/066,484
· Confirmation No. 1013
SLURRY FOR CHEMICAL MECHANICAL PLANARIZATION OF COBALT
Applicant:
Cabot Microelectronics Corporation
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2014-12-02 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2014-10-21 | TR.PROV |
Provisional Cover Sheet (SB16) | 1 | View | |
| 2014-10-21 | ADS |
Application Data Sheet | 4 | View | |
| 2014-10-21 | SPEC |
Specification | 31 | View | |
| 2014-10-21 | CLM |
Claims | 4 | View | |
| 2014-10-21 | ABST |
Abstract | 1 | View | |
| 2014-10-21 | PA.. |
Power of Attorney | 1 | View | |
| 2014-10-21 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2014-10-21 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2014-10-21 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Elise SIKMA
Bartlett, IL
Witold PAW
Aurora, IL
Benjamin PETRO
Aurora, IL
Jeffrey CROSS
Batavia, IL
Glenn WHITENER
Batavia, IL
Attorneys & Agents of Record
Prosecution
- Customer No.
- 29050
- Docket No.
- 100582P
- Confirmation No.
- 1013
Child
Claims priority from a provisional application
→
App. 14/919,490
· US 9,834,704
Filed 2015-10-21
· Patented Case
Child
PCT
Claims priority from a provisional application
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PCT/US2015/056744
Filed 2015-10-21
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
PCT
Claims priority from a provisional application
→
PCT/US2015/056749
Filed 2015-10-21
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 14/919,526
· US 9,944,828
Filed 2015-10-21
· Patented Case
Child
Claims priority from a provisional application
→
App. 15/603,634
· US 9,850,403
Filed 2017-05-24
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2015/056756
Filed 2015-10-21
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 14/919,404
· US 10,124,464
Filed 2015-10-21
· Patented Case
Child
Claims priority from a provisional application
→
App. 14/919,449
· US 9,688,885
Filed 2015-10-21
· Patented Case
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-10-20
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Quick Facts
- App. No.
- 62/066,484
- Filed
- 2014-10-21
External Links