IP Library › Granted Patent US 9,834,704
Granted Patent B2
US 9,834,704 · App. 14/919,490 · Granted Dec 5, 2017

Cobalt dishing control agents

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Quick Facts
Patent No.
US 9,834,704
App. No.
14/919,490
Granted
Dec 5, 2017
Kind
B2
Abstract

The invention provides a chemical-mechanical polishing composition comprising (a) abrasive particles, (b) a cobalt corrosion inhibitor, (c) a cobalt dishing control agent, wherein the cobalt dishing control agent comprises an anionic head group and a C 13 -C 20 aliphatic tail group, (d) an oxidizing agent that oxidizes cobalt, and (e) water, wherein the polishing composition has a pH of about 3 to about 8.5. The invention further provides a method of chemically-mechanically polishing a substrate with the inventive chemical-mechanical polishing composition. Typically, the substrate contains cobalt.

Claims (13)

1. A chemical-mechanical polishing composition comprising:

(a) abrasive particles,

(b) a cobalt corrosion inhibitor, wherein the cobalt corrosion inhibitor has the formula: RCON(CH3)CH2COOH wherein R is a C 8 -C 13 aliphatic group,

(c) a cobalt dishing control agent, wherein the cobalt dishing control agent has the formula: RCON(CH3)CH2COOH wherein R is a C 15 -C 17 aliphatic group, or is a C 16 -C 18 alkyl diphenyloxide disulfonate,

(d) an oxidizing agent that oxidizes cobalt, and

(e) water,

wherein the polishing composition has a pH of about 3 to about 8.5.

2. The polishing composition of claim 1 , wherein the polishing composition comprises about 0.1 wt. % to about 2 wt. % of abrasive particles.

3. The polishing composition of claim 1 , wherein the polishing composition comprises about 50 ppm to about 1000 ppm of the cobalt corrosion inhibitor.

4. The polishing composition of claim 1 , wherein the cobalt dishing control agent comprises an anionic head group and a C 15 -C 18 aliphatic tail group.

5. The polishing composition of claim 1 , wherein the polishing composition comprises about 5 ppm to about 100 ppm of the cobalt dishing control agent.

6. The polishing composition of claim 1 , wherein the polishing composition further comprises a cobalt accelerator, wherein the accelerator is iminodiacetic acid.

7. The polishing composition of claim 1 , wherein the oxidizing agent is hydrogen peroxide.

Assignments (9)
CHANGE OF NAME Recorded Nov 22, 2023
From: CMC MATERIALS, INC.
To: CMC MATERIALS LLC
Reel/Frame 065663/0466 →
CHANGE OF NAME Recorded Nov 8, 2023
From: CMC MATERIALS, INC.
To: CMC MATERIALS LLC
Reel/Frame 065517/0783 →
SECURITY INTEREST Recorded Jul 8, 2022
From: CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 060615/0001 →
SECURITY INTEREST Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
RELEASE OF SECURITY INTEREST Recorded Jul 6, 2022
From: JPMORGAN CHASE BANK, N.A.
To: CABOT MICROELECTRONICS CORPORATION; QED TECHNOLOGIES INTERNATIONAL, INC.; FLOWCHEM LLC; KMG ELECTRONIC CHEMICALS, INC.; KMG-BERNUTH, INC.; MPOWER SPECIALTY CHEMICALS LLC; SEALWELD (USA), INC.; INTERNATIONAL TEST SOLUTIONS, LLC; CMC MATERIALS, INC.
Reel/Frame 060592/0260 →
CHANGE OF NAME Recorded Jan 13, 2021
From: CABOT MICROELECTRONICS CORPORATION
To: CMC MATERIALS, INC.
Reel/Frame 054980/0681 →
SECURITY AGREEMENT Recorded Nov 16, 2018
From: CABOT MICROELECTRONICS CORPORATION; QED TECHNOLOGIES INTERNATIONAL, INC.; FLOWCHEM LLC; KMG ELECTRONIC CHEMICALS, INC.; MPOWER SPECIALTY CHEMICALS LLC
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 047588/0263 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 20, 2017
From: SIKMA, ELISE; PAW, WITOLD; PETRO, BENJAMIN; CROSS, JEFFREY; WHITENER, GLENN
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 043909/0908 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 21, 2017
From: KRAFT, STEVEN; WOLFF, ANDREW; CARTER, PHILLIP
To: CABOT MICROELECTRONICS CORPORATION
Reel/Frame 043069/0103 →