Patent Application
Provisional
App. No. 62/352,673
· Confirmation No. 2524
IMPLANTATION USING SOLID ALUMINUM IODIDE (ALI3) FOR PRODUCING ATOMIC ALUMINUM IONS AND IN SITU CLEANING OF ALUMINUM IODIDE AND ASSOCIATED BY-PRODUCTS
Inventors:
Dennis Elliott Kamenitsa, Richard J. Rzeszut, Fernando M. Silva, Jason R. Beringer, Xiangyang Wu, Neil K. Colvin
Applicant:
Axcelis Technologies, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2016-07-01 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2016-06-21 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2016-06-21 | ADS |
Application Data Sheet | 10 | View | |
| 2016-06-21 | SPEC |
Specification | 9 | View | |
| 2016-06-21 | CLM |
Claims | 5 | View | |
| 2016-06-21 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2016-06-21 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2016-06-21 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Dennis Elliott Kamenitsa
Austin, TX
Richard J. Rzeszut
Billeria, MA
Fernando M. Silva
Gloucester, MA
Jason R. Beringer
Topsfield, MA
Xiangyang Wu
Andover, MA
Neil K. Colvin
Merrimack, NH
Attorneys & Agents of Record
Prosecution
- Customer No.
- 29393
- Docket No.
- EATNP351P
- Confirmation No.
- 2524
Child
Claims priority from a provisional application
→
App. 15/627,952
· US 10,087,520
Filed 2017-06-20
· Patented Case
Child
Claims priority from a provisional application
→
App. 15/627,989
· US 10,774,419
Filed 2017-06-20
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2017/038420
Filed 2017-06-21
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
PCT
Claims priority from a provisional application
→
PCT/US2017/038422
Filed 2017-06-21
· RO PROCESSING COMPLETED-PLACED IN STORAGE
RELEASE OF SECURITY INTEREST
Recorded 2023-04-07
SECURITY INTEREST
Recorded 2020-07-31
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Quick Facts
- App. No.
- 62/352,673
- Filed
- 2016-06-21
External Links