Patent Application
Provisional
App. No. 62/444,620
· Confirmation No. 2314
ACTIVE WORKPIECE HEATING OR COOLING FOR AN ION IMPLANTATION SYSTEM
Applicant:
Axcelis Technologies, Inc.
Provisional Application Expired
|
⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-01-25 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2017-01-10 | SPEC |
Specification | 16 | View | |
| 2017-01-10 | CLM |
Claims | 5 | View | |
| 2017-01-10 | ABST |
Abstract | 1 | View | |
| 2017-01-10 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2017-01-10 | ADS |
Application Data Sheet | 9 | View | |
| 2017-01-10 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2017-01-10 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2017-01-10 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 29393
- Docket No.
- EATNP354P
- Confirmation No.
- 2314
Child
Claims priority from a provisional application
→
App. 15/866,209
Filed 2018-01-09
· Abandoned -- Failure to Respond to an Office Action
Child
Claims priority from a provisional application
→
App. 17/393,737
Filed 2021-08-04
· Abandoned -- Failure to Respond to an Office Action
Child
PCT
Claims priority from a provisional application
→
PCT/US2018/013068
Filed 2018-01-10
· RO PROCESSING COMPLETED-PLACED IN STORAGE
RELEASE OF SECURITY INTEREST
Recorded 2023-04-07
SECURITY INTEREST
Recorded 2020-07-31
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Quick Facts
- App. No.
- 62/444,620
- Filed
- 2017-01-10
External Links