Patent Application
Provisional
App. No. 62/576,791
· Confirmation No. 2613
SHALLOW ANGLE, MULTI-WAVELENGTH, MULTI-RECEIVER, ADJUSTABLE SENSITIVITY ALIGNER SENSOR FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
Applicant:
Axcelis Technologies, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-11-06 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2017-10-25 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2017-10-25 | ADS |
Application Data Sheet | 9 | View | |
| 2017-10-25 | SPEC |
Specification | 16 | View | |
| 2017-10-25 | CLM |
Claims | 4 | View | |
| 2017-10-25 | APPENDIX |
Appendix to the specification | 6 | View | |
| 2017-10-25 | APPENDIX |
Appendix to the specification | 20 | View | |
| 2017-10-25 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2017-10-25 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2017-10-25 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
John F. Baggett
Amesbury, MA
Billy Thomas Benoit
Beverly, MA
Joe Ferrara
Georgetown, MA
Brian Terry
Amesbury, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 29393
- Docket No.
- EATNP363P
- Confirmation No.
- 2613
RELEASE OF SECURITY INTEREST
Recorded 2023-04-07
SECURITY INTEREST
Recorded 2020-07-31
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Quick Facts
- App. No.
- 62/576,791
- Filed
- 2017-10-25
External Links