Patent Application
Provisional
App. No. 62/806,173
· Confirmation No. 6235
METHOD OF MIXING UPSTREAM AND DOWNSTREAM CURRENT MEASUREMENTS FOR INFERENCE OF THE BEAM CURRENT AT THE BEND OF AN OPTICAL ELEMENT FOR REALTIME DOSE CONTROL
Applicant:
Axcelis Technologies, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2019-04-01 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2019-02-15 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2019-02-15 | ADS |
Application Data Sheet | 9 | View | |
| 2019-02-15 | CLM |
Claims | 1 | View | |
| 2019-02-15 | SPEC |
Specification | 7 | View | |
| 2019-02-15 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2019-02-15 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
James DeLuca
Beverly, MA
Andy Ray
Newburyport, MA
Neil Demario
Fort Myers, FL
Rosario Mollica
Ipswich, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 29393
- Docket No.
- EATNP381P1
- Confirmation No.
- 6235
RELEASE OF SECURITY INTEREST
Recorded 2023-04-07
SECURITY INTEREST
Recorded 2020-07-31
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Quick Facts
- App. No.
- 62/806,173
- Filed
- 2019-02-15
External Links