Patent Application
Provisional
App. No. 62/822,313
· Confirmation No. 9997
LIQUID METAL ION SOURCE
Applicant:
Axcelis Technologies, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2019-04-02 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2019-03-22 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2019-03-22 | ADS |
Application Data Sheet | 9 | View | |
| 2019-03-22 | CLM |
Claims | 7 | View | |
| 2019-03-22 | SPEC |
Specification | 15 | View | |
| 2019-03-22 | DRW |
Drawings-only black and white line drawings | 10 | View | |
| 2019-03-22 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2019-03-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Neil Bassom
Hamilton, MA
Neil Colvin
Merrimack, MA
Tseh-Jen Hsieh
Rowley, MA
Michael Ameen
Newburyport, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 29393
- Docket No.
- EATNP383P
- Confirmation No.
- 9997
RELEASE OF SECURITY INTEREST
Recorded 2023-04-07
SECURITY INTEREST
Recorded 2020-07-31
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Quick Facts
- App. No.
- 62/822,313
- Filed
- 2019-03-22
External Links