Patent Application
Provisional
App. No. 62/834,667
· Confirmation No. 3312
MULTIPLE ARC CHAMBER SOURCE
Applicant:
Axcelis Technologies, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2019-04-26 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2019-04-16 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2019-04-16 | ADS |
Application Data Sheet | 10 | View | |
| 2019-04-16 | SPEC |
Specification | 8 | View | |
| 2019-04-16 | CLM |
Claims | 5 | View | |
| 2019-04-16 | DRW |
Drawings-only black and white line drawings | 16 | View | |
| 2019-04-16 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2019-04-16 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Joshua Abeshaus
Salem, MA
Neil Bassom
Hamilton, MA
Camilla Lambert
Beverly, MA
Caleb Bell
Beverly, MA
Kyle Hinds
Beverly, MA
Caleb Wisch
Beverly, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 29393
- Docket No.
- EATNP384P
- Confirmation No.
- 3312
RELEASE OF SECURITY INTEREST
Recorded 2023-04-07
SECURITY INTEREST
Recorded 2020-07-31
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Quick Facts
- App. No.
- 62/834,667
- Filed
- 2019-04-16
External Links