Patent Application
Provisional
App. No. 62/853,945
· Confirmation No. 4891
CHARGE STRIPPING FOR ION IMPLANTATION SYSTEMS
Inventor:
Shu Satoh
Applicant:
Axcelis Technologies, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2019-06-05 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2019-05-29 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2019-05-29 | ADS |
Application Data Sheet | 8 | View | |
| 2019-05-29 | CLM |
Claims | 7 | View | |
| 2019-05-29 | SPEC |
Specification | 14 | View | |
| 2019-05-29 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2019-05-29 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2019-05-29 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Shu Satoh
Byfield, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 29393
- Docket No.
- EATNP385P
- Confirmation No.
- 4891
RELEASE OF SECURITY INTEREST
Recorded 2023-04-07
SECURITY INTEREST
Recorded 2020-07-31
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Quick Facts
- App. No.
- 62/853,945
- Filed
- 2019-05-29
External Links