Patent Application
Provisional
App. No. 62/857,883
· Confirmation No. 4456
SYSTEM AND METHOD FOR EXTENDING A LIFETIME OF AN ION SOURCE OBJECT FOR MOLECULAR CARBON IMPLANTS
Applicant:
Axcelis Technologies, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2019-06-11 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2019-06-06 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2019-06-06 | ADS |
Application Data Sheet | 9 | View | |
| 2019-06-06 | CLM |
Claims | 5 | View | |
| 2019-06-06 | SPEC |
Specification | 13 | View | |
| 2019-06-06 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2019-06-06 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2019-06-06 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
David Sporleder
Billerica, MA
Neil Bassom
Hamilton, MA
Neil K. Colvin
Merrimack, NH
Mike Ameen
Newburyport, MA
Xiao Xu
Needham, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 29393
- Docket No.
- EATNP386P
- Confirmation No.
- 4456
RELEASE OF SECURITY INTEREST
Recorded 2023-04-07
SECURITY INTEREST
Recorded 2020-07-31
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Quick Facts
- App. No.
- 62/857,883
- Filed
- 2019-06-06
External Links