IP Library › Patent Application 62971473
Patent Application Provisional
App. No. 62/971,473 · Confirmation No. 4614

APPARATUS AND METHOD FOR METAL CONTAMINATION CONTROL IN AN ION IMPLANTATION SYSTEM USING CHARGE STRIPPING MECHANISM

Provisional Application Expired
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 Code Description Pages PDF
2020-04-16 APP.FILE.REC Filing Receipt 3 View
2020-02-07 ADS Application Data Sheet 9 View
2020-02-07 TR.PROV Provisional Cover Sheet (SB16) 4 View
2020-02-07 SPEC Specification 17 View
2020-02-07 CLM Claims 4 View
2020-02-07 DRW Drawings-only black and white line drawings 7 View
2020-02-07 WFEE Fee Worksheet (SB06) 2 View
2020-02-07 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
62/971,473
Filed
2020-02-07