Patent Assignment
Reel/Frame 006432/0623
Assignment of Assignors Interest.
Recorded: 1993-02-09
Pages: 2
Assignee
SVGT LITHOGRAPHY SYSTEMS, INC.
77 DANBURY ROAD, WILTON, CONNECTICUT, 06897-0877
Covered Property
(1)
Wafer Stage with Reference Surface
Patent:
5,285,142 →
Application:
08/015,520 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.