Patent Assignment
Reel/Frame 006872/0842
Assignment of Assignor's Interest
Recorded: 1994-02-09
Pages: 3
Assignee
MICROUNITY SYSTEMS ENGINEERING INC.
255 CASPIAN DRIVE, SUNNYVALE, CALIFORNIA, 94089-1015
Covered Property
(1)
Masks for Improved Lithographic Patterning for Off-Axis Illumination Lithography
Patent:
5,447,810 →
Application:
08/194,097 →
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Oct 4, 2006
From: MICROUNITY SYSTEMS ENGINEERING, INC.
To: ASM LITHOGRAPHY HOLDING, N.V.
Reel/Frame 018345/0353 →
Assignment of Assignor's Interest
Oct 4, 2006
From: ASM LITHOGRAPHY HOLDING, N.V.
To: ASML MASKTOOLS NETHERLANDS B.V.
Reel/Frame 018345/0764 →
Assignment of Assignor's Interest
Feb 7, 2014
From: ASML MASKTOOLS B.V.
To: ASML NETHERLANDS B.V.
Reel/Frame 032170/0425 →