Patent Assignment
Reel/Frame 018345/0353
Assignment of Assignor's Interest
Recorded: 2006-10-04
Pages: 6
Assignor
MICROUNITY SYSTEMS ENGINEERING, INC.
Executed: 1999-07-02
Assignee
ASM LITHOGRAPHY HOLDING, N.V.
P.O. BOX 324, VELDHOVEN, 5500, NETHERLANDS
Covered Properties
(6)
Mask for Photolithography
Patent:
5,242,770 →
Application:
07/821,793 →
Lithographical Mask for Controlling the Dimensions of Resist Patterns
Patent:
5,256,505 →
Application:
07/933,393 →
Method for Improved Lithographic Patterning in a Semiconductor Fabrication Process
Patent:
5,340,700 →
Application:
08/149,122 →
Masks for Improved Lithographic Patterning for Off-Axis Illumination Lithography
Patent:
5,447,810 →
Application:
08/194,097 →
Method for Generating Proximity Correction Features for a Lithographic Mask Pattern
Patent:
5,663,893 →
Application:
08/433,730 →
Vertex Based Geometry Engine System for Use in Integrated Circuit Design
Patent:
5,887,155 →
Application:
08/687,043 →
Related Assignments
(7)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignors Interest.
Jan 16, 1992
From: CHEN, JANG F.; MATTHEWS, JAMES A.
To: MICROUNITY SYSTEMS ENGINEERING, INC.
Reel/Frame 005995/0449 →
Assignment of Assignors Interest.
Aug 21, 1992
From: CHEN, JANG F.; MATTHEWS, JAMES A.
To: MICROUNITY SYSTEMS ENGINEERING, INC.
Reel/Frame 006256/0499 →
Assignment of Assignor's Interest
Feb 9, 1994
From: CHEN, JANG F.; MATTHEWS, JAMES A.
To: MICROUNITY SYSTEMS ENGINEERING INC.
Reel/Frame 006872/0842 →
Assignment of Assignor's Interest
May 3, 1995
From: WAMPLER, KURT E.; LAIDIG, THOMAS L.
To: MICROUNITY SYSTEMS ENGINEERING, INC.
Reel/Frame 007516/0013 →
Assignment of Assignor's Interest
Jul 25, 1996
From: LAIDIG, THOMAS
To: MICROUNITY SYSTEMS ENGINEERING, INC.
Reel/Frame 008139/0279 →
Assignment of Assignor's Interest
Oct 4, 2006
From: ASM LITHOGRAPHY HOLDING, N.V.
To: ASML MASKTOOLS NETHERLANDS B.V.
Reel/Frame 018345/0764 →
Assignment of Assignor's Interest
Feb 7, 2014
From: ASML MASKTOOLS B.V.
To: ASML NETHERLANDS B.V.
Reel/Frame 032170/0425 →