Patent Assignment
Reel/Frame 011343/0606
Assignment of Assignor's Interest
Recorded: 2000-12-06
Pages: 3
Assignor
CHEN, J. FUNG
Executed: 2000-12-01
Assignee
ASML MASKTOOLS NETHERLANDS
PO BOX 324, VELDHOVEN, 5500, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Detecting Aberrations in a Projection Lens Utilized for Projection Optics
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.