Patent Assignment
Reel/Frame 011965/0404
Assignment of Assignor's Interest
Recorded: 2001-07-05
Pages: 4
Assignee
SIMPLUS SYSTEMS CORPORATION
40737 ENCYCLOPEDIA CIRCLE, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Plasma Semiconductor Processing System and Method
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 11, 2004
From: SIMPLUS SYSTEMS CORPORATION
To: TEGAL CORPORATION
Reel/Frame 014327/0484 →
Assignment of Assignor's Interest
Mar 18, 2004
From: SIMPLUS SYSTEMS CORPORATION
To: TEGAL CORPORATION
Reel/Frame 015083/0228 →
Assignment of Assignor's Interest
Jan 23, 2012
From: TEGAL CORPORATION
To: LAM RESEARCH CORPORATION
Reel/Frame 027579/0964 →