Patent Assignment
Reel/Frame 027579/0964
Assignment of Assignor's Interest
Recorded: 2012-01-23
Pages: 6
Assignor
TEGAL CORPORATION
Executed: 2012-01-10
Assignee
LAM RESEARCH CORPORATION
4300 CUSHING PARKWAY, FREMONT, CALIFORNIA, USA 94538
Covered Properties
(18)
High Flow Conductance and High Thermal Conductance Showerhead System and Method
Patent:
6,565,661 →
Application:
09/325,835 →
Three-Dimensional Showerhead Apparatus
Patent:
6,444,039 →
Application:
09/520,108 →
Multi-thermal zone shielding apparatus
Patent:
6,221,166 →
Application:
09/589,625 →
Liquid Delivery System Emulsifior
Patent:
6,488,272 →
Application:
09/589,632 →
Visual Indicator Cold Trapping System
Patent:
6,800,254 →
Application:
09/589,633 →
Replaceable Shielding Apparatus
Patent:
6,440,219 →
Application:
09/589,635 →
High Pressure Chemical Vapor Trapping System
Patent:
6,998,097 →
Application:
09/589,636 →
Vaporizer for Sensitive Precursors
Patent:
6,572,707 →
Application:
09/594,887 →
Integrated Precursor Delivery System
Patent:
6,572,706 →
Application:
09/596,517 →
Redistributing Radiation Guide
Removable Lid and Floating Pivot
Multi-Thermal Zone Shielding Apparatus
Plasma Semiconductor Processing System and Method
Replaceable Shielding Apparatus
Removable Lid and Floating Pivot
Replaceable Shielding Apparatus
Multi-Thermal Zone Shielding Apparatus
High Pressure Chemical Vapor Trapping Method
Related Assignments
(19)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 7, 2000
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 010846/0574 →
Assignment of Assignor's Interest
Jun 7, 2000
From: NGUYEN, TUE; BERCAW, CRAIG ALAN
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 010857/0834 →
Assignment of Assignor's Interest
Jun 7, 2000
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 010849/0097 →
Assignment of Assignor's Interest
Jun 7, 2000
From: NGUYEN, TUE; BERCAW, CRAIG ALAN
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 010849/0049 →
Assignment of Assignor's Interest
Jun 7, 2000
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 010849/0046 →
Assignment of Assignor's Interest
Jun 14, 2000
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 012927/0167 →
Assignment of Assignor's Interest
Jun 19, 2000
From: NGUYEN, TUE; BERCAW, CRAIG ALAN
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 010880/0869 →
Assignment of Assignor's Interest
Dec 6, 2000
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 011359/0378 →
Assignment of Assignor's Interest
Jan 18, 2001
From: NGUYEN, TUE; BERCAW, CRAIG ALAN
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 011483/0819 →
Assignment of Assignor's Interest
Jan 19, 2001
From: NGUYEN, TUE; BERCAW, CRAIG ALAN
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 011471/0223 →
Assignment of Assignor's Interest
Jul 5, 2001
From: NGUYEN, TUE; NGUYEN, TAI DUNG
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 011965/0404 →
Assignment of Assignor's Interest
Jul 16, 2002
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 013103/0590 →
Assignment of Assignor's Interest
Jul 10, 2003
From: NGUYEN, TUE; BERCAW, CRAIG ALAN
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 014280/0784 →
Assignment of Assignor's Interest
Aug 7, 2003
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 014381/0763 →
Assignment of Assignor's Interest
Feb 10, 2004
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 014326/0291 →
Assignment of Assignor's Interest
Feb 10, 2004
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 014321/0857 →
Assignment of Assignor's Interest
Feb 11, 2004
From: SIMPLUS SYSTEMS CORPORATION
To: TEGAL CORPORATION
Reel/Frame 014327/0484 →
Assignment of Assignor's Interest
Mar 18, 2004
From: SIMPLUS SYSTEMS CORPORATION
To: TEGAL CORPORATION
Reel/Frame 015083/0228 →
Assignment of Assignor's Interest
Jul 2, 2004
From: SIMPLUS SYSTEMS CORPORATION
To: TEGAL CORPORATION
Reel/Frame 014814/0204 →