Removable lid and floating pivot
A semiconductor processing system includes a chamber adapted to process a wafer, the chamber having an opening to facilitate access to the interior of the chamber. The system has a lid coupled to the chamber opening, the lid having an open position and a closed position. An actuator is connected to the lid to move the lid between the closed position and the open position. The system may include a floating pivot coupled to the lid and the actuator to align the lid with the opening when the lid closes.
1. A semiconductor processing system, comprising: a chamber adapted to process a wafer, the chamber having an opening to facilitate access to the interior of the chamber; a lid coupled to the chamber opening, the lid having an open position and a closed position; an actuator coupled to the lid to move the lid between the closed position and the open position; and a self-centering floating pivot coupled to the lid and the actuator to align the lid with the opening when the lid closes.
2. The system of claim 1 , further comprising a fixed pivot coupled to the lid and the actuator.
3. The system of claim 2 , further comprising a guide link coupled to the fixed pivot.
4. The system of claim 1 , further comprising a load link coupled to the floating pivot.
5. The system of claim 1 , further comprising a guide shaft rotatably coupled to the load link.
6. The system of claim 1 , further comprising a drive pivot positioned at one end of the load link.
7. The system of claim 6 , further comprising a rod extending from the actuator coupled to the drive pivot to move the lid.
8. The system of claim 1 , further comprising a support bracket coupled to the actuator and the chamber body.
9. The system of claim 1 , wherein the actuator is air actuated or hydraulically actuated.
10. The system of claim 1 , wherein the actuator is motorized.
11. A semiconductor processing system, comprising: a chamber adapted to process a wafer, the chamber having an opening to facilitate access to the interior of the chamber; and a lid coupled to the chamber opening, the lid having an open position and a closed position, the open and closed positions being moved translationally in a substantially parallel manner relative to the opening; and an actuator coupled to the lid to move the lid between the closed position and the open position.
12. The system of claim 11 , further comprising a self-centering floating pivot to automatically align the lid to the body of the chamber.
13. The system of claim 12 , wherein the pivot further comprises: a load link having first and second portions; a bearing positioned between the first and second portions of the bearing; and a self-centering spring coupled to the perimeter of the bearing.
14. A semiconductor processing system, comprising;
a chamber adapted to process a wafer, the chamber having an opening to facilitate access to the interior of the chamber;
a lid coupled to the chamber opening, the lid having an opened position and a closed position;
an actuator coupled to the lid to move the lid between closed position and the opened position; and
a floating pivot coupled to the lid and the actuator to align the lid with the opening when the lid closes;
wherein the actuator is motorized.
15. A semiconductor processing system, comprising;
a chamber adapted to process a wafer, the chamber having an opening to facilitate access to the interior of the chamber; and
a lid coupled to the chamber opening, the lid having an open position and a closed position, the opened and the closed positions being moved horizontally in a substantially parallel manner relative to the opening; and
a actuator coupled to the lid to move the lid between the closed position and the opened position;
a floating pivot to automatically align the lid to the body of the chamber;
wherein the pivot further comprises:
a load link having first and second portions;
a bearing positioned between the first and second portions of the bearing; and
self-centering spring coupled to the perimeter of the bearing.