Patent Assignment
Reel/Frame 014327/0484
Assignment of Assignor's Interest
Recorded: 2004-02-11
Pages: 6
Assignor
SIMPLUS SYSTEMS CORPORATION
Executed: 2003-11-10
Assignee
TEGAL CORPORATION
2201 SOUTH MCDOWELL BOULEVARD, PETALUMA, CALIFORNIA, 94954-6903
Covered Properties
(29)
High Flow Conductance and High Thermal Conductance Showerhead System and Method
Patent:
6,565,661 →
Application:
09/325,835 →
Multilayered Diffusion Barrier Structure for Improving Adhesion Property
Patent:
6,495,449 →
Application:
09/520,107 →
Three-Dimensional Showerhead Apparatus
Patent:
6,444,039 →
Application:
09/520,108 →
Multi-thermal zone shielding apparatus
Patent:
6,221,166 →
Application:
09/589,625 →
Liquid Delivery System Emulsifior
Patent:
6,488,272 →
Application:
09/589,632 →
Replaceable Shielding Apparatus
Patent:
6,440,219 →
Application:
09/589,635 →
Vaporizer for Sensitive Precursors
Patent:
6,572,707 →
Application:
09/594,887 →
Integrated Precursor Delivery System
Patent:
6,572,706 →
Application:
09/596,517 →
Plasma Enhanced Pulsed Layer Deposition
Patent:
6,689,220 →
Application:
09/721,162 →
Redistributing Radiation Guide
Removable Lid and Floating Pivot
Multi-Thermal Zone Shielding Apparatus
Semiconductor Processing System and Method
Plasma Semiconductor Processing System and Method
Nanolayer Thick Film Processing System and Method
Replaceable Shielding Apparatus
Assembly line processing system
Application:
10/212,545 →
Publication:
US 2004/0058293
Assembly Line Processing Method
method and system for sequential processing in a two-compartment chamber
Two-Compartment Chamber for Sequential Processing
Patent:
6,858,085 →
Application:
10/213,003 →
Multilayered Copper Structure for Improving Adhesion Property
Multilayered Diffusion Barrier Structure for Improving Adhesion Property
Method to Deposit an Impermeable Film on Porous Low-K Dielectric Film
Method to Plasma Deposit on Organic Polymer Dielectric Film
Nanolayer Deposition Process
Semiconductor processing system and method
Application:
10/403,211 →
Publication:
US 2005/0037597
Integrated precursor delivery system
Application:
10/434,376 →
Publication:
US 2003/0196603
Removable Lid and Floating Pivot
Replaceable Shielding Apparatus
Related Assignments
(25)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 7, 2000
From: NGUYEN, TUE; BERCAW, CRAIG ALAN
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 010857/0834 →
Assignment of Assignor's Interest
Jun 7, 2000
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 010849/0046 →
Assignment of Assignor's Interest
Jun 7, 2000
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 010849/0097 →
Assignment of Assignor's Interest
Jun 14, 2000
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 012927/0167 →
Assignment of Assignor's Interest
Jun 19, 2000
From: NGUYEN, TUE; BERCAW, CRAIG ALAN
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 010880/0869 →
Assignment of Assignor's Interest
Nov 22, 2000
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 011341/0840 →
Assignment of Assignor's Interest
Dec 6, 2000
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 011359/0378 →
Assignment of Assignor's Interest
Jan 18, 2001
From: NGUYEN, TUE; BERCAW, CRAIG ALAN
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 011483/0819 →
Assignment of Assignor's Interest
Jan 19, 2001
From: NGUYEN, TUE; BERCAW, CRAIG ALAN
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 011471/0223 →
Assignment of Assignor's Interest
Apr 21, 2001
From: NGUYEN, TUE; NGUYEN, TAI DUNG; BERCAW, CRAIG ALAN
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 011739/0410 →
Assignment of Assignor's Interest
Jul 5, 2001
From: NGUYEN, TUE; NGUYEN, TAI DUNG
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 011965/0404 →
Assignment of Assignor's Interest
Sep 10, 2001
From: NGUYEN, TUE; NGUYEN, TAI DUNG
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 012181/0856 →
Assignment of Assignor's Interest
Jul 16, 2002
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 013103/0590 →
Assignment of Assignor's Interest
Aug 6, 2002
From: NGUYEN, TUE; NGUYEN, TAI DUNG; BERCAW, CRAIG ALAN
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 013178/0044 →
Assignment of Assignor's Interest
Aug 6, 2002
From: NGUYEN, TUE; NGUYEN, TAI DUNG; BERCAW, CRAIG ALAN
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 013168/0839 →
Assignment of Assignor's Interest
Aug 6, 2002
From: NGUYEN, TUE; NGUYEN, TIA DUNG; BERCAW, CRAIG ALAN
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 013178/0050 →
Assignment of Assignor's Interest
Aug 6, 2002
From: NGUYEN, TUE; NGUYEN, TAI DUNG; BERCAW, CRAIG ALAN
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 013178/0080 →
Assignment of Assignor's Interest
Aug 23, 2002
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 013236/0561 →
Assignment of Assignor's Interest
Feb 10, 2004
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 014321/0821 →
Assignment of Assignor's Interest
Feb 10, 2004
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 014326/0291 →
Assignment of Assignor's Interest
Feb 10, 2004
From: NGUYEN, TUE
To: SIMPLUS SYSTEMS CORPORATION
Reel/Frame 014321/0857 →
Assignment of Assignor's Interest
Mar 18, 2004
From: SIMPLUS SYSTEMS CORPORATION
To: TEGAL CORPORATION
Reel/Frame 015083/0228 →
Assignment of Assignor's Interest
Jan 23, 2012
From: TEGAL CORPORATION
To: LAM RESEARCH CORPORATION
Reel/Frame 027579/0964 →
Assignment of Assignor's Interest
Jan 25, 2012
From: TEGAL CORPORATION
To: ASM INTERNATIONAL N.V.
Reel/Frame 027596/0526 →
Change of Name
Mar 17, 2014
From: TEGAL CORPORATION
To: COLLABRX, INC.
Reel/Frame 032454/0886 →