Patent Assignment
Reel/Frame 014326/0291
Assignment of Assignor's Interest
Recorded: 2004-02-10
Pages: 2
Assignor
NGUYEN, TUE
Executed: 2000-06-22
Assignee
SIMPLUS SYSTEMS CORPORATION
40737 ENCYCLOPEDIA CIRCLE, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
High Flow Conductance and High Thermal Conductance Showerhead System and Method
Patent:
6,565,661 →
Application:
09/325,835 →
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 11, 2004
From: SIMPLUS SYSTEMS CORPORATION
To: TEGAL CORPORATION
Reel/Frame 014327/0484 →
Assignment of Assignor's Interest
Mar 18, 2004
From: SIMPLUS SYSTEMS CORPORATION
To: TEGAL CORPORATION
Reel/Frame 015083/0228 →
Assignment of Assignor's Interest
Jan 23, 2012
From: TEGAL CORPORATION
To: LAM RESEARCH CORPORATION
Reel/Frame 027579/0964 →