Granted Patent
Utility
US 6,610,169
· Confirmation No. 3453
SEMICONDUCTOR PROCESSING SYSTEM AND METHOD
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-04-21 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-04-21 | SPEC |
Specification | 22 | View | |
| 2001-04-21 | CLM |
Claims | 4 | View | |
| 2001-04-21 | ABST |
Abstract | 1 | View | |
| 2001-04-21 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2001-04-21 | OATH |
Oath or Declaration filed | 3 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
118/723E
C23C16/45536
H10P72/0602
H10P72/0436
C23C16/45561
C23C16/481
C23C16/515
Prosecution
- Examiner
- DANG, THI D
- Art Unit
- 1763
- Docket No.
- SIM076
- Confirmation No.
- 3453
Publication
- Pub. No.
- US20020153101A1
- Pub. Date
- 2002-10-24
Patent Term Adjustment
-134days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-03-18
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2004-02-11
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-04-21
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Quick Facts
- Patent No.
- US 6,610,169
- App. No.
- 09/840,349
- Filed
- 2001-04-21
- Granted
- 2003-08-26
- Pub. No.
- US20020153101A1
- Examiner
- DANG, THI D
- Art Unit
- 1763
- PTA
- -134 days
External Links