IP Library › Assignment 012018/0180
Patent Assignment
Reel/Frame 012018/0180

Assignment of Assignor's Interest

Recorded: 2001-07-24 Pages: 4
Assignors
HAN, QUINGYUAN
Executed: 2001-07-07
BERRY, IVAN
Executed: 2001-07-07
SAKTHIVEL, PALANI
Executed: 2001-07-07
WALDFRIED, CARLO
Executed: 2001-07-07
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property (1)
Plasma Ashing Process
Patent: 6,548,416 →
Application: 09/911,682 →
Publication: US 2003/0022511
Related Assignments (3)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Assignment of Assignor's Interest Dec 21, 2012
From: AXCELIS TECHNOLOGIES, INC.
To: LAM RESEARCH CORPORATION
Reel/Frame 029529/0757 →
Termination of Security Agreement Apr 16, 2013
From: SILICON VALLEY BANK
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 030302/0719 →