Patent Assignment
Reel/Frame 012172/0366
Assignment of Assignor's Interest
Recorded: 2001-09-14
Pages: 5
Assignee
YIELD DYNAMICS, INC.
986 WALSH AVENUE, SANTA CLARA, CALIFORNIA, 95050
Covered Property
(1)
System and Method for Analyzing Error Information from a Semiconductor Fabrication Process
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 5, 2008
From: YIELD DYNAMICS, INC.
To: MKS INSTRUMENTS, INC.
Reel/Frame 021489/0065 →
Assignment of Assignor's Interest
Sep 3, 2010
From: MKS INSTRUMENTS, INC.
To: RUDOLPH TECHNOLOGIES, INC.
Reel/Frame 024946/0388 →
Assignment of Assignor's Interest
Jul 2, 2020
From: RUDOLPH TECHNOLOGIES, INC.
To: ONTO INNOVATION INC.
Reel/Frame 053117/0623 →