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US 6,768,961 · Confirmation No. 4835

SYSTEM AND METHOD FOR ANALYZING ERROR INFORMATION FROM A SEMICONDUCTOR FABRICATION PROCESS

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2020-07-02 OATH Oath or Declaration filed 84 View
2011-01-03 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2010-12-17 PA.. Power of Attorney 4 View
2010-12-17 TRAN.LET Transmittal Letter 1 View
2008-10-14 RETMAIL Mail returned to USPTO as undelivered 2 View
2008-09-29 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-09-29 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-09-24 LET. Miscellaneous Incoming Letter 1 View
2008-09-24 PA.. Power of Attorney 2 View
2008-09-24 LET. Miscellaneous Incoming Letter 1 View
2008-09-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2004-06-16 IFEE Issue Fee Payment (PTO-85B) 3 View
2004-04-16 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-16 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-04-16 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-04-16 FWCLM Index of Claims 1 View
2004-04-16 SRFW Search information including classification, databases and other search related notes 2 View
2004-03-30 SRNT Examiner's search strategy and results 1 View
2004-03-05 WFEE Fee Worksheet (SB06) 1 View
2004-03-05 FWCLM Index of Claims 1 View
2004-02-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-02-10 CLM Claims 5 View
2004-02-10 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2003-10-20 CTNF Non-Final Rejection 10 View
2003-10-20 892 List of references cited by examiner 1 View
2003-10-09 SRNT Examiner's search strategy and results 1 View
2003-08-14 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-08-14 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-06-03 CTNF Non-Final Rejection 8 View
2003-06-03 892 List of references cited by examiner 1 View
2003-05-06 SRNT Examiner's search strategy and results 2 View
2002-01-10 DRW Drawings-only black and white line drawings 6 View
2002-01-10 LET. Miscellaneous Incoming Letter 2 View
2002-01-10 LET. Miscellaneous Incoming Letter 2 View
2002-01-10 TRNA Transmittal of New Application 4 View
2002-01-10 DRW Drawings-only black and white line drawings 6 View
2001-10-15 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2001-09-14 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-09-14 SRFW Search information including classification, databases and other search related notes 1 View
2001-09-14 FWCLM Index of Claims 1 View
2001-09-14 TRNA Transmittal of New Application 3 View
2001-09-14 DRW Drawings-only black and white line drawings 8 View
2001-09-14 SPEC Specification 14 View
2001-09-14 CLM Claims 5 View
2001-09-14 ABST Abstract 1 View
2001-09-14 OATH Oath or Declaration filed 4 View
2001-09-14 WFEE Fee Worksheet (SB06) 1 View
2001-09-14 WFEE Fee Worksheet (SB06) 1 View
2001-09-14 WCLM Claims Worksheet (PTO-2022) 1 View
2001-09-14 TRNA Transmittal of New Application 3 View
2001-09-14 SPEC Specification 14 View
2001-09-14 CLM Claims 5 View
2001-09-14 ABST Abstract 1 View
2001-09-14 DRW Drawings-only black and white line drawings 7 View
2001-09-14 OATH Oath or Declaration filed 4 View
2001-09-14 LET. Miscellaneous Incoming Letter 1 View
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Quick Facts
Patent No.
US 6,768,961
App. No.
09/952,848
Filed
2001-09-14
Granted
2004-07-27
Pub. No.
US20030055592A1
Art Unit
2857
PTA
-21 days