Patent Assignment
Reel/Frame 012828/0428
Assignment of Assignor's Interest
Recorded: 2002-04-23
Pages: 3
Assignee
ASML US, INC.
77 DANBURY ROAD, WILTON, CONNECTICUT, 06897
Covered Property
(1)
System and Method for Improving Line Width Control in a Lithography Device Using an Illumination System Having Pre-Numerical Aperture Control
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 19, 2003
From: ASML US, INC.
To: ASML HOLDING N.V.
Reel/Frame 013743/0510 →
Merger
Aug 6, 2004
From: ASM LITHOGRAPHY, INC. AND ASML US, LLC
To: ASML US, INC.
Reel/Frame 014953/0042 →
Conversion
Aug 6, 2004
From: ASML US, INC.
To: ASML US, LLC
Reel/Frame 014953/0047 →