IP Library › Granted Patent US 6,784,976
Granted Patent Utility
US 6,784,976 · Confirmation No. 6916

SYSTEM AND METHOD FOR IMPROVING LINE WIDTH CONTROL IN A LITHOGRAPHY DEVICE USING AN ILLUMINATION SYSTEM HAVING PRE-NUMERICAL APERTURE CONTROL

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Quick Facts
Patent No.
US 6,784,976
App. No.
10/127,506
Filed
2002-04-23
Granted
2004-08-31
Pub. No.
US20030197846A1
Art Unit
2851
PTA
-121 days