Patent Assignment
Reel/Frame 013499/0744
Assignment of Assignor's Interest
Recorded: 2002-11-15
Pages: 2
Assignee
HITACHI, LTD.
6, KANADA SURUGADAI 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Radiation-Sensitive Composition and Method for Forming Patterns and Fabricating Semiconductor Devices
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.