Patent Assignment
Reel/Frame 013886/0325
Assignment of Assignor's Interest
Recorded: 2003-03-12
Pages: 3
Assignor
OH, HILARIO L.
Executed: 2003-03-10
Assignee
ASML NETHERLANDS B.V.
DE RUN 1110, VELDHOVEN, NL-5003 LA, NETHERLANDS
Covered Property
(1)
Method and system to compensate for scanner system timing variability in a semiconductor wafer fabrication system
Application:
60/454,386 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.