Patent Assignment
Reel/Frame 014944/0311
Assignment of Assignor's Interest
Recorded: 2004-02-03
Pages: 3
Assignor
ASML NETHERLANDS B.V.
Executed: 2004-01-27
Assignee
ASML HOLDING N. V.
DE RUN 1110, 5503 LA VELDHOVEN, NETHERLANDS
Covered Properties
(2)
Integrally Formed Bake Plate Unit for Use in Wafer Fabrication System
Method and system to compensate for scanner system timing variability in a semiconductor wafer fabrication system
Application:
60/454,386 →
Related Assignments
(2)
Other recorded transfers of the patents in this record — the chain of ownership.