IP Library › Patent Application 60454386
Patent Application Provisional
App. No. 60/454,386 · Confirmation No. 9470

Method and system to compensate for scanner system timing variability in a semiconductor wafer fabrication system

Inventor: Hilario L. Oh
Provisional Application Expired
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 Code Description Pages PDF
2009-05-22 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2009-05-22 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2008-10-14 LET. Miscellaneous Incoming Letter 1 View
2008-10-14 PA.. Power of Attorney 1 View
2008-10-14 R3.73 Assignee showing of ownership per 37 CFR 3.73 1 View
2008-10-14 N417 Electronic Filing System Acknowledgment Receipt 2 View
2003-03-12 TRNA Transmittal of New Application 1 View
2003-03-12 SPEC Specification 19 View
2003-03-12 CLM Claims 4 View
2003-03-12 ABST Abstract 1 View
2003-03-12 DRW Drawings-only black and white line drawings 10 View
2003-03-12 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
60/454,386
Filed
2003-03-12