Patent Assignment
Reel/Frame 013912/0545
Assignment of Assignor's Interest
Recorded: 2003-04-02
Pages: 4
Assignors
SWEENEY, JOSEPH D.
Executed: 2003-03-05
MARGANSKI, PAUL J.
Executed: 2003-03-05
OLANDER, W. KARL
Executed: 2003-03-24
WANG, LUPING
Executed: 2003-03-05
Assignee
ADVANCED TECHNOLOGY MATERIALS INC.
7 COMMERCE DRIVE, DANBURY, CONNECTICUT, 06810
Covered Property
(1)
Method and Apparatus for the Abatement of Toxic Gas Components from a Semiconductor Manufacturing Process Effluent Stream
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.