IP Library Patent Application 10314727
Patent Application Utility
App. No. 10/314,727 · Confirmation No. 9796

METHOD AND APPARATUS FOR THE ABATEMENT OF TOXIC GAS COMPONENTS FROM A SEMICONDUCTOR MANUFACTURING PROCESS EFFLUENT STREAM

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2006-12-04 N570 Communication - Re: Power of Attorney (PTOL-308) 2 View
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2004-09-02 IFEE Issue Fee Payment (PTO-85B) 4 View
2004-08-23 LET. Miscellaneous Incoming Letter 3 View
2004-08-23 DRW Drawings-only black and white line drawings 4 View
2004-06-03 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-06-03 NOA Notice of Allowance and Fees Due (PTOL-85) 1 View
2004-06-03 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-06-03 SRFW Search information including classification, databases and other search related notes 1 View
2004-05-18 A.NE Response After Final Action 1 View
2004-05-18 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-05-18 LET. Miscellaneous Incoming Letter 1 View
2004-03-26 WFEE Fee Worksheet (SB06) 1 View
2004-03-19 CTFR Final Rejection 4 View
2004-03-19 FWCLM Index of Claims 1 View
2004-03-19 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-25 LET. Miscellaneous Incoming Letter 1 View
2004-02-25 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-02-25 SPEC Specification 1 View
2004-02-25 CLM Claims 7 View
2004-02-25 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-09-04 CTNF Non-Final Rejection 5 View
2003-09-04 892 List of references cited by examiner 1 View
2003-09-04 1449 List of References cited by applicant and considered by examiner 1 View
2003-04-02 LET. Miscellaneous Incoming Letter 5 View
2003-04-02 OATH Oath or Declaration filed 4 View
2003-03-24 LET. Miscellaneous Incoming Letter 1 View
2003-03-24 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-03-24 FOR Foreign Reference 11 View
2003-03-24 FOR Foreign Reference 29 View
2003-03-24 FOR Foreign Reference 2 View
2003-02-19 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2002-12-09 TRNA Transmittal of New Application 2 View
2002-12-09 SPEC Specification 21 View
2002-12-09 CLM Claims 6 View
2002-12-09 ABST Abstract 1 View
2002-12-09 DRW Drawings-only black and white line drawings 4 View
2002-12-09 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-12-09 SRFW Search information including classification, databases and other search related notes 1 View
2002-12-09 FWCLM Index of Claims 1 View
2002-12-09 TRNA Transmittal of New Application 2 View
2002-12-09 DRW Drawings-only black and white line drawings 4 View
2002-12-09 SPEC Specification 21 View
2002-12-09 CLM Claims 6 View
2002-12-09 ABST Abstract 1 View
2002-12-09 WFEE Fee Worksheet (SB06) 1 View
2002-12-09 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/314,727
Filed
2002-12-09
Granted
2004-10-19
Pub. No.
US20040107833A1
Art Unit
1724
PTA
-141 days