Patent Assignment
Reel/Frame 014224/0589
Assignment of Assignor's Interest
Recorded: 2003-06-20
Pages: 3
Assignors
BENVENISTE, VICTOR M.
Executed: 2003-06-18
DIVERGILIO, WILLIAM F.
Executed: 2003-06-18
VANDERBERG, BO H.
Executed: 2003-06-19
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property
(1)
Thin Magnetron Structures for Plasma Generation in Ion Implantation Systems
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.