IP Library › Assignment 014224/0589
Patent Assignment
Reel/Frame 014224/0589

Assignment of Assignor's Interest

Recorded: 2003-06-20 Pages: 3
Assignors
BENVENISTE, VICTOR M.
Executed: 2003-06-18
DIVERGILIO, WILLIAM F.
Executed: 2003-06-18
VANDERBERG, BO H.
Executed: 2003-06-19
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915-1053
Covered Property (1)
Thin Magnetron Structures for Plasma Generation in Ion Implantation Systems
Patent: 6,879,109 →
Application: 10/600,775 →
Publication: US 2004/0227470
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Agreement May 9, 2008
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK
Reel/Frame 020986/0143 →
Consent and License Agreement Apr 17, 2009
From: AXCELIS TECHNOLOGIES, INC.
To: SEN CORPORATION
Reel/Frame 022562/0758 →