Patent Assignment
Reel/Frame 014273/0689
Assignment of Assignor's Interest
Recorded: 2004-01-14
Pages: 2
Assignor
ROUX, STEPHEN
Executed: 2003-12-22
Assignee
ASML HOLDING N.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Isolating Light Source Gas from Main Chamber Gas in a Lithography Tool
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.