IP Library › Granted Patent US 6,770,895
Granted Patent Utility
US 6,770,895 · Confirmation No. 7114

METHOD AND APPARATUS FOR ISOLATING LIGHT SOURCE GAS FROM MAIN CHAMBER GAS IN A LITHOGRAPHY TOOL

Inventor: Stephen Roux
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2004-08-09 PETDEC Petition Decision 2 View
2004-08-09 PGREF Request for Refund of Publication Fee Paid 1 View
2004-07-29 PETWDISS Petition to Withdraw from Issue 15 View
2004-07-29 IMIS Miscellaneous Internal Document 1 View
2004-07-29 LET. Miscellaneous Incoming Letter 2 View
2004-07-29 LET. Miscellaneous Incoming Letter 3 View
2004-07-29 IDS Information Disclosure Statement (IDS) Form (SB08) 6 View
2004-07-29 FOR Foreign Reference 14 View
2004-07-29 FOR Foreign Reference 10 View
2004-07-29 PETWDISS Petition to Withdraw from Issue 1 View
2004-05-19 XRUSH Internal Response to Printer Query from Technology Center(TC) 2 View
2004-01-08 RUSH Printer Query form, used by the publications branch 1 View
2004-01-06 IFEE Issue Fee Payment (PTO-85B) 4 View
2003-10-09 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-10-09 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-10-09 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-10-09 FWCLM Index of Claims 1 View
2003-10-09 SRFW Search information including classification, databases and other search related notes 1 View
2003-09-30 SRNT Examiner's search strategy and results 20 View
2003-08-28 LET. Miscellaneous Incoming Letter 1 View
2003-08-28 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-08-28 CLM Claims 4 View
2003-08-28 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-06-09 CTNF Non-Final Rejection 7 View
2003-06-09 892 List of references cited by examiner 1 View
2003-06-01 SRNT Examiner's search strategy and results 16 View
2002-11-21 TRNA Transmittal of New Application 4 View
2002-11-21 ADS Application Data Sheet 1 View
2002-11-21 SPEC Specification 8 View
2002-11-21 CLM Claims 4 View
2002-11-21 ABST Abstract 1 View
2002-11-21 DRW Drawings-only black and white line drawings 4 View
2002-11-21 OATH Oath or Declaration filed 2 View
2002-11-21 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-11-21 SRFW Search information including classification, databases and other search related notes 1 View
2002-11-21 FWCLM Index of Claims 1 View
2002-11-21 TRNA Transmittal of New Application 5 View
2002-11-21 DRW Drawings-only black and white line drawings 4 View
2002-11-21 SPEC Specification 8 View
2002-11-21 CLM Claims 4 View
2002-11-21 ABST Abstract 1 View
2002-11-21 OATH Oath or Declaration filed 2 View
2002-11-21 WFEE Fee Worksheet (SB06) 1 View
2002-11-21 WFEE Fee Worksheet (SB06) 1 View
2002-11-21 XT/ Extension of Time 1 View
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Quick Facts
Patent No.
US 6,770,895
App. No.
10/300,898
Filed
2002-11-21
Granted
2004-08-03
Pub. No.
US20040099816A1
Art Unit
2881
PTA
-59 days