Change of Name

Recorded: 2004-03-08 Pages: 5

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Assignor

CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES

Executed: 2002-10-28

Assignee

CARL ZEISS SMT AG

CARL-ZEISS-STR.22, D-73447 OBERKOCHEN, GERMANY

Covered Property (1)

Method for Optimizing the Image Properties of at Least Two Optical Elements as Well as Methods for Optimizing the Image Properties of at Least Three Optical Elements

Patent: 6,678,240 →

Application: 10/247,270 →

Publication: US 2003/0071986

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.

Assignment of Assignor's Interest Jun 28, 2005

From: GEH, BERND; GRAUPNER, PAUL; STAMMLER, THOMAS; STENKAMP, DIRK

To: CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES

Reel/Frame 016195/0003 →

A Modifying Conversion Jan 18, 2011

From: CARL ZEISS SMT AG

To: CARL ZEISS SMT GMBH

Reel/Frame 025763/0367 →